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About this book

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Table of Contents

Frontmatter

2018 | OriginalPaper | Chapter

Chapter 1. Introduction

Alexey Ivanov

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Chapter 2. State of the art

Alexey Ivanov

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Chapter 3. Experimental, characterization and simulation methods

Alexey Ivanov

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Chapter 4. Microscale study of anodization process

Alexey Ivanov

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Chapter 5. Anodization process as a structuring technique

Alexey Ivanov

2018 | OriginalPaper | Chapter

Chapter 6. General conclusions

Alexey Ivanov

Backmatter

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