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2017 | OriginalPaper | Chapter

Silicon Micro-gyroscope Closed-Loop Correction and Frequency Tuning Control

Authors : Xingjun Wang, Bo Yang, Bo Dai, Yunpeng Deng, Di Hu

Published in: Wearable Sensors and Robots

Publisher: Springer Singapore

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Abstract

In this paper, we present the improved performance of silicon micro-gyroscope under closed-loop correction and frequency tuning. First, this paper analyzes the source of the quadrature error in the micro-gyroscope. Second, the mode-matching state of the silicon vibratory gyroscope is studied. The sense mode resonant frequency is tuned to be closed to the drive mode resonant frequency under the mode-matched condition. Then, the closed-loop system correction is realized under the mode-matched condition and the proportion-integral differential correction with a passive impedance network. Finally, the experiment results demonstrate the feasibility of the closed-loop system correction scheme under the mode-matched condition.

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Metadata
Title
Silicon Micro-gyroscope Closed-Loop Correction and Frequency Tuning Control
Authors
Xingjun Wang
Bo Yang
Bo Dai
Yunpeng Deng
Di Hu
Copyright Year
2017
Publisher
Springer Singapore
DOI
https://doi.org/10.1007/978-981-10-2404-7_26