Special issue on design, test, integration and packaging of MEMS/MOEMS: DTIP, Cannes, 2014
Authors:
Souhil Megherbi Bernd Michel
Publication date
14-11-2015
DOI
https://doi.org/10.1007/s00542-015-2712-3
Publisher
Springer Berlin Heidelberg
Journal
Microsystem Technologies
Micro- and Nanosystems
Information Storage and Processing Systems
Issue 3/2016
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858