Skip to main content
Top
Published in: Microsystem Technologies 8/2019

17-10-2018 | Technical Paper

Stacking of nanocrystalline graphene for nano-electro-mechanical (NEM) actuator applications

Published in: Microsystem Technologies | Issue 8/2019

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

Graphene nano-electro-mechanical switches are promising components due to their excellent switching performance such as low pull-in voltage and low contact resistance. Mass fabrication with an appropriate counter electrode remains challenging. In this work, we report the stacking of nanocrystalline graphene (NCG) with a 70-nm dielectric separation layer. The buried NCG layer is contacted through the formation of vias and acts as actuation electrode. After metallization, the top 7.5-nm thin NCG layer is patterned to form double-clamped beams, and the structure is released by hydrofluoric acid etching. By applying a voltage between the top and buried NCG layer, a step-like current increase is observed below 1.5 V, caused by the contact of the movable beam with the buried NCG. No pull-out is observed due to the thin sacrificial layer and high beam length, resulting in low mechanical restoring force. We discuss the possible applications of the NCG stacking approach to realize nano-electro-mechanical contact switches and advanced logical components such as a AND logic.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literature
go back to reference Dadgour HF, Banerjee K (2007) Design and analysis of hybrid NEMS–CMOS circuits for ultra low-power applications. In: 2007 44th ACM/IEEE design automation conference, pp 306–311 Dadgour HF, Banerjee K (2007) Design and analysis of hybrid NEMS–CMOS circuits for ultra low-power applications. In: 2007 44th ACM/IEEE design automation conference, pp 306–311
go back to reference Jothiramalingam K, Manoharan M, Schmidt ME et al (2017) Finite element method simulation of graphene nanoelectromechanical contact switches with surface trenches. In: 2017 Conference on emerging devices and smart systems (ICEDSS), pp 137–141 Jothiramalingam K, Manoharan M, Schmidt ME et al (2017) Finite element method simulation of graphene nanoelectromechanical contact switches with surface trenches. In: 2017 Conference on emerging devices and smart systems (ICEDSS), pp 137–141
go back to reference Wang W, Muruganathan M, Kulothungan J, Mizuta H (2017) Study of dynamic contacts for graphene nano-electromechanical switches. Jpn J Appl Phys 56:04CK05CrossRef Wang W, Muruganathan M, Kulothungan J, Mizuta H (2017) Study of dynamic contacts for graphene nano-electromechanical switches. Jpn J Appl Phys 56:04CK05CrossRef
Metadata
Title
Stacking of nanocrystalline graphene for nano-electro-mechanical (NEM) actuator applications
Publication date
17-10-2018
Published in
Microsystem Technologies / Issue 8/2019
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-4180-z

Other articles of this Issue 8/2019

Microsystem Technologies 8/2019 Go to the issue