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Measurement Techniques
Published in: Measurement Techniques 1/2016

29-04-2016

Study of the Properties of High-Sensitivity Thermally-Stable Thin-Film Resistance Strain Gauges for Integral Pressure Sensors

Authors: I. V. Volokhov, S. A. Gurin, I. R. Vergazov

Published in: Measurement Techniques | Issue 1/2016

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Abstract

The operating principle and major causes of instability in strain-gauge pressure sensors under severe service conditions are discussed. New designs and technologies are proposed for high-sensitivity, thermally-stable, resistance strain gauges employing new materials. Technologies for increasing the stability of the parameters of these sensors are described.
previous article Study of the Inner Phase Interface Structure in an Indium Freezing Fixed Point Cell
next article Effect of Errors in Specifying External Working Parameters on the Accuracy of Temperature Measurements with Infrared Instruments

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Literature
1.
I. V. Volokhov, "Technological methods for increasing the reliability of thin-film resistance strain gauge pressure sensors," Sci.-Tech. Conf. Current Problems in Rocket and Space Equipment Manufacturing and in Information Technologies: Report Collect., Rus. Res. Inst. Space Equipment Manufacturing, Moscow (2007).
2.
I. A. Averin, I. V. Volokhov, E. A. Mokrov, and R. M. Pecherskaya, "Effect of transient processes in thin-film heterogeneous structures on the reliability of the sensor elements in resistance strain gauge pressure sensors," Izv. Vuz. Povolzh. Reg. Tekhn. Nauki, No. 2, 123–127 (2008).
3.
A. N. Lugin, "Effect of thermal-mechanical interactions on the temperature and temporal stability of the resistance of precision thin-film resistors," Elektron. Prom., No. 1, 57–60 (1995).
4.
M. A. Rozenblat, "Microtronics – a new approach to the development of sensors and actuator devices," Prib. Sist. Upravl., No. 12, 49–57 (1996).
5.
V. A. Tikhonenkov, V. A. Mishin, and A. I. Tikhonov, Technology for Production of Metal-Film Sensors of Mechanical Quantities: Textbook, Ulyanovsk State Techn. Univ., Ulyanovsk (2003).
6.
A. V. Korlyakov, Growth Phase Polytype Transformations during Epitaxy of Silicon Carbide and Aluminum Nitride: Auth. Abstr. Dissert. Cand. Phys.-Math. Sci., LETI, Leningrad (1989).
7.
S. A. Gurin and R. M. Pecherskaya, "Features of technologies for producing 'aluminum nitride on silicon carbide' structures for sensor elements," Izv. Vuz. Povolzh. Reg. Tekhn. Nauki, No. 1, 46–53 (2014).
8.
E. A. Mokrov, E. M. Belozubov, and D. V. Tikhomirov, "Minimizing error in thin-film resistance strain-gauge pressure sensors exposed to transient temperatures," Datch. Sist., No. 1, 26–29 (2004).
9.
E. M. Belozubov, Patent No. 1615578 RF, "Pressure sensor," Isobret., No. 17 (1994).
10.
E. A. Mokrov, I. V. Volokhov, O. N. Gerasimov, and Yu. M. Krysin, Design of Sensors Based on Thin-Film Technologies: Teach. Aid, IITs Penz. Gos. Univ., Penza (2007), p. 79.
11.
I. V. Volokhov, Technological Methods for Increasing the Stability of the Parameters of Thin-Film Resistance Strain-Gauge Pressure Sensors: Auth. Abstr. Dissert. Cand. Tekhn. Sci., Penza (2008).
Metadata
Title
Study of the Properties of High-Sensitivity Thermally-Stable Thin-Film Resistance Strain Gauges for Integral Pressure Sensors
Authors
I. V. Volokhov
S. A. Gurin
I. R. Vergazov
Publication date
29-04-2016
Publisher
Springer US
Published in
Measurement Techniques / Issue 1/2016
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI
https://doi.org/10.1007/s11018-016-0921-5

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