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Published in: The International Journal of Advanced Manufacturing Technology 5-8/2015

Open Access 01-11-2015 | ORIGINAL ARTICLE

Surface and subsurface characterisation in micro-milling of monocrystalline silicon

Authors: Dehong Huo, Chao Lin, Zi Jie Choong, Ketan Pancholi, Patrick Degenaar

Published in: The International Journal of Advanced Manufacturing Technology | Issue 5-8/2015

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Metadata
Title
Surface and subsurface characterisation in micro-milling of monocrystalline silicon
Authors
Dehong Huo
Chao Lin
Zi Jie Choong
Ketan Pancholi
Patrick Degenaar
Publication date
01-11-2015
Publisher
Springer London
Published in
The International Journal of Advanced Manufacturing Technology / Issue 5-8/2015
Print ISSN: 0268-3768
Electronic ISSN: 1433-3015
DOI
https://doi.org/10.1007/s00170-015-7308-7

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