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Insights into the Mechanism of Gas Sensor Operation Read chapter Read first chapter

2013 | OriginalPaper | Chapter

6. Synthesis of Metal Oxide Nanomaterials for Chemical Sensors by Molecular Beam Epitaxy

Authors : Manjula I. Nandasiri, Satyanarayana V. N. T. Kuchibhatla, Suntharampillai Thevuthasan

Published in: Metal Oxide Nanomaterials for Chemical Sensors

Publisher: Springer New York

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Abstract

In order to develop next generation chemical sensors using nano-scale materials, we need to understand the sensing mechanisms at atomic level. This requires synthesizing chemical sensing materials with controlled structure, chemical composition and surface morphology. Although the commonly used wet chemical synthesis methods provide quality materials for large-scale production of materials, alternative thin film deposition techniques such as sputtering, chemical vapor deposition (CVD), and molecular beam epitaxy (MBE) can also be useful to achieve atomic-scale control over the structure and composition over a large fabrication area for potential device fabrication as well as to gain an understanding of the chemical sensing properties of nano-scale materials. Especially, MBE has been used to synthesize metal oxide thin films with ultra-pure, well-ordered surfaces, which can be used to understand the effect of surface morphology, structure, and composition on the gas sensing properties. In this chapter, we provide a detailed discussion of thin film growth using MBE along with some in situ characterization capabilities such as reflection high energy electron diffraction (RHEED) and low energy electron diffraction (LEED). In addition, this chapter focuses on the discussion of the growth, characterization and gas sensing properties of metal oxide thin films such as doped CeO2 and SnO2. The chapter also emphasizes the significance of various in situ and ex situ characterization techniques to understand the material properties there by developing methodologies to synthesize better materials with tunable characteristics for sensing applications.

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previous chapter Selective Crystal Structure Synthesis and Sensing Dependencies
next chapter Atomic Layer Deposition for Metal Oxide Nanomaterials
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Metadata
Title
Synthesis of Metal Oxide Nanomaterials for Chemical Sensors by Molecular Beam Epitaxy
Authors
Manjula I. Nandasiri
Satyanarayana V. N. T. Kuchibhatla
Suntharampillai Thevuthasan
Copyright Year
2013
Publisher
Springer New York
Book
Metal Oxide Nanomaterials for Chemical Sensors

Print ISBN: 978-1-4614-5394-9

Electronic ISBN: 978-1-4614-5395-6

Copyright Year: 2013

DOI
https://doi.org/10.1007/978-1-4614-5395-6_6

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