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Advanced Manufacturing Metrology in Context of Industry 4.0 Model Read chapter Read first chapter

2019 | OriginalPaper | Chapter

System Development for Microsphere Measurement Based on Whispering Gallery Mode Resonance

Authors : Masaki Michihata, Yumeki Kobayashi, Bohuai Chu, Kiyoshi Takamasu, Satoru Takahashi

Published in: Proceedings of the 12th International Conference on Measurement and Quality Control - Cyber Physical Issue

Publisher: Springer International Publishing

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Abstract

A sphere is frequently used as a reference for calibration of 3-dimensional measurement instruments because of its isotropic shape. Assuring an accuracy of the reference sphere is responsible for measurement uncertainty. Therefore, sphericity and diameter of the reference sphere need to be guaranteed with high accuracy. For micro-scale 3-dimentional metrology, size of the reference sphere is also micro-scale from several millimeters to a few tens of micrometers. These spheres have to be measured with accuracy of better than 10 nm. We have proposed the new measurement method of a microsphere based on whispering gallery mode resonances. One of the key points to the proposed method is to measure the whispering gallery mode resonant wavelength accurately. In this paper, the measurement instruments of whispering gallery mode resonances in the microsphere was developed.

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previous chapter Advanced Manufacturing Metrology in Context of Industry 4.0 Model
next chapter Verification of the CMM Measuring Path Based on the Modified Hammersly’s Algorithm
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Metadata
Title
System Development for Microsphere Measurement Based on Whispering Gallery Mode Resonance
Authors
Masaki Michihata
Yumeki Kobayashi
Bohuai Chu
Kiyoshi Takamasu
Satoru Takahashi
Copyright Year
2019
Book
Proceedings of the 12th International Conference on Measurement and Quality Control - Cyber Physical Issue

Print ISBN: 978-3-030-18176-5

Electronic ISBN: 978-3-030-18177-2

Copyright Year: 2019

DOI
https://doi.org/10.1007/978-3-030-18177-2_2

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