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Published in:
2023 | OriginalPaper | Chapter
6. Temperature Influence on Silicon-Based MEMS Gyroscope and Suppression Method
Author : Huiliang Cao
Published in: Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
Publisher: Springer Nature Singapore
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Abstract
Because the sensitive structure of silicon micromachined gyroscope is sensitive to temperature, the temperature has a great influence on the silicon micromachined gyroscope, and the influence not only occurs in the change of the working environment temperature of the gyroscope, but also the heat generated by the circuit of the micromachined gyroscope when the environment temperature is constant is enough to make the output signal of the gyroscope drift.