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Journal of Computational Electronics
Published in:

03-05-2023

Thermally compensated ZnO film bulk acoustic resonator for RF application above 5GHz frequency

Authors: Poorvi K. Joshi, Meghana A. Hasamnis, Rajendra M. Patrikar

Published in: Journal of Computational Electronics | Issue 4/2023

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Abstract

We present a study of the effect of introducing two-series air gap capacitor and tailoring the oxide in thin-film bulk acoustic resonator (FBARs) for thermal compensation at a frequency > 5 GHz. This approach reduces the temperature coefficient of frequency value of ZnO FBAR upto 0.011 ppm\(/^\circ\) C within the industrial temperature range at 5.45 GHz frequency. The quality factor of the compensated FBARs is 1100 with a motional impedance of 38 \(\Omega\). This exceeds significantly the quality factor of uncompensated FBARs (\(\sim\)120). Additionally, we report on the stress and strain required to obtain an optimal design of compensated FBARs.
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Metadata
Title
Thermally compensated ZnO film bulk acoustic resonator for RF application above 5GHz frequency
Authors
Poorvi K. Joshi
Meghana A. Hasamnis
Rajendra M. Patrikar
Publication date
03-05-2023
Publisher
Springer US
Published in
Journal of Computational Electronics / Issue 4/2023
Print ISSN: 1569-8025
Electronic ISSN: 1572-8137
DOI
https://doi.org/10.1007/s10825-023-02044-6

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