The paper considers the problem of topological optimization of multilayer structural elements of MEMS/NEMS resonators with an adhesive layer under the action of mechanical loads. The purpose of this work is to obtain a design solution that is least susceptible to destruction due to an increase in the rigidity of the elements to be joined and, as a consequence, providing smoothing of stress peaks in the adhesive layer. To demonstrate the operation of the topological optimization algorithm for this class of problems, several examples are given that show significant improvements in the set target indicators. The problems were solved by the finite element method with the application of the sliding asymptotes method.
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- Topological Optimization of Multilayer Structural Elements of MEMS/NEMS Resonators with an Adhesive Layer Subjected to Mechanical Loads
Anton V. Krysko
Pavel V. Dunchenkin
Maxim V. Zhigalov
Vadim A. Krysko
- Copyright Year
- Springer International Publishing