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2022 | OriginalPaper | Chapter

Topological Optimization of Multilayer Structural Elements of MEMS/NEMS Resonators with an Adhesive Layer Subjected to Mechanical Loads

Authors : Anton V. Krysko, Jan Awrejcewicz, Pavel V. Dunchenkin, Maxim V. Zhigalov, Vadim A. Krysko

Published in: Recent Approaches in the Theory of Plates and Plate-Like Structures

Publisher: Springer International Publishing

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Abstract

The paper considers the problem of topological optimization of multilayer structural elements of MEMS/NEMS resonators with an adhesive layer under the action of mechanical loads. The purpose of this work is to obtain a design solution that is least susceptible to destruction due to an increase in the rigidity of the elements to be joined and, as a consequence, providing smoothing of stress peaks in the adhesive layer. To demonstrate the operation of the topological optimization algorithm for this class of problems, several examples are given that show significant improvements in the set target indicators. The problems were solved by the finite element method with the application of the sliding asymptotes method.

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previous chapter Dimension Reduction in the Plate with Tunnel Cuts
next chapter Forced Vibration Analysis of Laminated Piezoelectric Plates by a Strong Sampling Surfaces Formulation
Metadata
Title
Topological Optimization of Multilayer Structural Elements of MEMS/NEMS Resonators with an Adhesive Layer Subjected to Mechanical Loads
Authors
Anton V. Krysko
Jan Awrejcewicz
Pavel V. Dunchenkin
Maxim V. Zhigalov
Vadim A. Krysko
Copyright Year
2022
Book
Recent Approaches in the Theory of Plates and Plate-Like Structures

Print ISBN: 978-3-030-87184-0

Electronic ISBN: 978-3-030-87185-7

Copyright Year: 2022

DOI
https://doi.org/10.1007/978-3-030-87185-7_13