Skip to main content
Erschienen in: Microsystem Technologies 1/2018

30.09.2016 | Technical Paper

Ethanol gas sensors based on multi-wall carbon nanotubes on oxidized Si substrate

verfasst von: S. J. Young, Z. D. Lin

Erschienen in: Microsystem Technologies | Ausgabe 1/2018

Einloggen

Aktivieren Sie unsere intelligente Suche um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

In this study, ethanol gas sensors were fulfilled by utilizing the vertically aligned carbon nanotubes (CNTs). CNTs were synthesized by thermal chemical vapor deposition (CVD) at 700 °C under C2H2 atmosphere. From field-emission scanning electron microscope (FESEM), it was found that the average length and average diameter of the CNTs were about 4.52 μm and 45 nm, respectively. Further, carbon nanotube ethanol gas sensors were fabricated. Under 800 ppm ethanol vapor concentration and at room temperature, it was found that the sensitivity of the carbon nanotube ethanol gas sensor was 1.67 %.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literatur
Zurück zum Zitat Cantalini C, Valentini L, Armentano I, Lozzi L, Kenny JM, Santucci S (2003) Sensitivity to NO2 and cross-sensitivity analysis to NH3, ethanol and humidity of carbon nanotubes thin film prepared by PECVD. Sens Actuators B 95:195–202CrossRef Cantalini C, Valentini L, Armentano I, Lozzi L, Kenny JM, Santucci S (2003) Sensitivity to NO2 and cross-sensitivity analysis to NH3, ethanol and humidity of carbon nanotubes thin film prepared by PECVD. Sens Actuators B 95:195–202CrossRef
Zurück zum Zitat Chang SJ, Hsueh TJ, Chen IC, Huang BR (2008) Highly sensitive ZnO nanowire CO sensors with the adsorption of Au nanoparticles. Nanotechnology 19:175502CrossRef Chang SJ, Hsueh TJ, Chen IC, Huang BR (2008) Highly sensitive ZnO nanowire CO sensors with the adsorption of Au nanoparticles. Nanotechnology 19:175502CrossRef
Zurück zum Zitat da Silva LB, Fagan SB, Mota R (2004) Ab initio study of deformed carbon nanotube sensors for carbon monoxide molecules. Nano Lett 4:65–67CrossRef da Silva LB, Fagan SB, Mota R (2004) Ab initio study of deformed carbon nanotube sensors for carbon monoxide molecules. Nano Lett 4:65–67CrossRef
Zurück zum Zitat Emmenegger C, Bonard JM, Mauron P, Sudan P, Lepora A, Grobety B, Zuttel A, Schlapbach L (2003) Synthesis of carbon nanotubes over Fe catalyst on aluminium and suggested growth mechanism. Carbon 41:539–547CrossRef Emmenegger C, Bonard JM, Mauron P, Sudan P, Lepora A, Grobety B, Zuttel A, Schlapbach L (2003) Synthesis of carbon nanotubes over Fe catalyst on aluminium and suggested growth mechanism. Carbon 41:539–547CrossRef
Zurück zum Zitat Hofmann S, Ducati C, Neill RJ, Piscanec S, Ferrari AC, Geng J, Dunin-Borkowski RE, Robertson J (2003) Gold catalyzed growth of silicon nanowires by plasma enhanced chemical vapor deposition. J Appl Phys 94:6005–6012CrossRef Hofmann S, Ducati C, Neill RJ, Piscanec S, Ferrari AC, Geng J, Dunin-Borkowski RE, Robertson J (2003) Gold catalyzed growth of silicon nanowires by plasma enhanced chemical vapor deposition. J Appl Phys 94:6005–6012CrossRef
Zurück zum Zitat Huang CS, Huang BR, Jang YH, Tsai MS, Yeh CY (2005) Three-terminal CNTs gas sensor for N-2 detection. Diamond Relat Mater 14:1872–1875CrossRef Huang CS, Huang BR, Jang YH, Tsai MS, Yeh CY (2005) Three-terminal CNTs gas sensor for N-2 detection. Diamond Relat Mater 14:1872–1875CrossRef
Zurück zum Zitat Huang CS, Huang BR, Hsiao CH, Yeh CY, Huang CC, Jang YH (2008) Effects of the catalyst pretreatment on CO2 sensors made by carbon nanotubes. Diamond Relat Mater 17:624–627CrossRef Huang CS, Huang BR, Hsiao CH, Yeh CY, Huang CC, Jang YH (2008) Effects of the catalyst pretreatment on CO2 sensors made by carbon nanotubes. Diamond Relat Mater 17:624–627CrossRef
Zurück zum Zitat Joshi KA, Prouza M, Kum M, Wang J, Tang J, Haddon R, Chen W, Mulchandani A (2006) V-type nerve agent detection using a carbon nanotube-based amperometric enzyme electrode. Anal Chem 78:331–336CrossRef Joshi KA, Prouza M, Kum M, Wang J, Tang J, Haddon R, Chen W, Mulchandani A (2006) V-type nerve agent detection using a carbon nanotube-based amperometric enzyme electrode. Anal Chem 78:331–336CrossRef
Zurück zum Zitat Leite ER, Weber IT, Longo E, Varela JA (2000) A new method to control particle size and particle size distribution of SnO2 nanoparticles for gas sensor applications. Adv Mater 12:965–968CrossRef Leite ER, Weber IT, Longo E, Varela JA (2000) A new method to control particle size and particle size distribution of SnO2 nanoparticles for gas sensor applications. Adv Mater 12:965–968CrossRef
Zurück zum Zitat Li W, Jung H, Nguyen DH, Kim D, Hong SK, Kim H (2010) Nanocomposite of cobalt oxide nanocrystals and single-walled carbon nanotubes for a gas sensor application. Sens Actuators B 150:160–166CrossRef Li W, Jung H, Nguyen DH, Kim D, Hong SK, Kim H (2010) Nanocomposite of cobalt oxide nanocrystals and single-walled carbon nanotubes for a gas sensor application. Sens Actuators B 150:160–166CrossRef
Zurück zum Zitat Miao JY, Hwang DW, Narasimhulu KV, Lin PI, Chen YT, Lin SH, Hwang LP (2004) Synthesis and properties of carbon nanospheres grown by CVD using Kaolin supported transition metal catalysts. Carbon 42:813–822CrossRef Miao JY, Hwang DW, Narasimhulu KV, Lin PI, Chen YT, Lin SH, Hwang LP (2004) Synthesis and properties of carbon nanospheres grown by CVD using Kaolin supported transition metal catalysts. Carbon 42:813–822CrossRef
Zurück zum Zitat Odom TW, Huang JL, Kim P, Lieber CM (1998) Atomic structure and electronic properties of single-walled carbon nanotubes. Nature 391:62–64CrossRef Odom TW, Huang JL, Kim P, Lieber CM (1998) Atomic structure and electronic properties of single-walled carbon nanotubes. Nature 391:62–64CrossRef
Zurück zum Zitat Ouyang M, Huang JL, Lieber CM (2002) Fundamental electronic properties and applications of single-walled carbon nanotubes. Acc Chem Res 35:1018–1025CrossRef Ouyang M, Huang JL, Lieber CM (2002) Fundamental electronic properties and applications of single-walled carbon nanotubes. Acc Chem Res 35:1018–1025CrossRef
Zurück zum Zitat Penza M, Cassano G, Aversa P, Antolini F, Cusano A, Cutolo A, Giordano M, Nicolais L (2004) Alcohol detection using carbon nanotubes acoustic and optical sensors. Appl Phys Lett 85:2379–2381CrossRef Penza M, Cassano G, Aversa P, Antolini F, Cusano A, Cutolo A, Giordano M, Nicolais L (2004) Alcohol detection using carbon nanotubes acoustic and optical sensors. Appl Phys Lett 85:2379–2381CrossRef
Zurück zum Zitat Penza M, Cassano G, Aversa P, Cusano A, Cutolo A, Giordano M, Nicolais L (2005) Carbon nanotube acoustic and optical sensors for volatile organic compound detection. Nanotechnology 16:2536–2547CrossRef Penza M, Cassano G, Aversa P, Cusano A, Cutolo A, Giordano M, Nicolais L (2005) Carbon nanotube acoustic and optical sensors for volatile organic compound detection. Nanotechnology 16:2536–2547CrossRef
Zurück zum Zitat Penza M, Cassano G, Aversa P, Cusano A, Consales M, Giordano M, Nicolais L (2006) Acoustic and optical VOCs sensors incorporating carbon nanotubes. IEEE Sens J 6:867–875CrossRef Penza M, Cassano G, Aversa P, Cusano A, Consales M, Giordano M, Nicolais L (2006) Acoustic and optical VOCs sensors incorporating carbon nanotubes. IEEE Sens J 6:867–875CrossRef
Zurück zum Zitat Penza M, Rossi R, Alvisi M, Cassano G, Serra E (2009a) Functional characterization of carbon nanotube networked films functionalized with tuned loading of Au nanoclusters for gas sensing applications. Sens Actuators B 140:176–184CrossRef Penza M, Rossi R, Alvisi M, Cassano G, Serra E (2009a) Functional characterization of carbon nanotube networked films functionalized with tuned loading of Au nanoclusters for gas sensing applications. Sens Actuators B 140:176–184CrossRef
Zurück zum Zitat Penza M, Rossi R, Alvisi M, Signore MA, Cassano G, Dimaio D, Pentassuglia R, Piscopiello E, Serra E, Falconieri M (2009b) Characterization of metal-modified and vertically-aligned carbon nanotube films for functionally enhanced gas sensor applications. Thin Solid Films 517:6211–6216CrossRef Penza M, Rossi R, Alvisi M, Signore MA, Cassano G, Dimaio D, Pentassuglia R, Piscopiello E, Serra E, Falconieri M (2009b) Characterization of metal-modified and vertically-aligned carbon nanotube films for functionally enhanced gas sensor applications. Thin Solid Films 517:6211–6216CrossRef
Zurück zum Zitat Randeniya LK, Martin PJ, Bendavid A, McDonnell J (2011) Ammonia sensing characteristics of carbon-nanotube yarns decorated with nanocrystalline gold. Carbon 49:5265–5270CrossRef Randeniya LK, Martin PJ, Bendavid A, McDonnell J (2011) Ammonia sensing characteristics of carbon-nanotube yarns decorated with nanocrystalline gold. Carbon 49:5265–5270CrossRef
Zurück zum Zitat Someya T, Small J, Kim P, Nuckolls C, Yardley JT (2003) Alcohol vapor sensors based on single-walled carbon nanotube field effect transistors. Nano Lett 3:877–881CrossRef Someya T, Small J, Kim P, Nuckolls C, Yardley JT (2003) Alcohol vapor sensors based on single-walled carbon nanotube field effect transistors. Nano Lett 3:877–881CrossRef
Zurück zum Zitat Varghese K, Kichambre PD, Gong D, Ong KG, Dickey EC, Grimes CA (2001) Gas sensing characteristics of multi-wall carbon nanotubes. Sens Actuators B 81:32–41CrossRef Varghese K, Kichambre PD, Gong D, Ong KG, Dickey EC, Grimes CA (2001) Gas sensing characteristics of multi-wall carbon nanotubes. Sens Actuators B 81:32–41CrossRef
Zurück zum Zitat Wang ZL (2003) Nanobelts, nanowires, and nanodiskettes of semiconducting oxides—from materials to nanodevices. Adv Mater 15:432–436CrossRef Wang ZL (2003) Nanobelts, nanowires, and nanodiskettes of semiconducting oxides—from materials to nanodevices. Adv Mater 15:432–436CrossRef
Zurück zum Zitat Wildöer JWG, Venema LC, Rinzler AG, Smalley RE, Dekker C (1988) Electronic structure of atomically resolved carbon nanotubes. Nature 391:59–62CrossRef Wildöer JWG, Venema LC, Rinzler AG, Smalley RE, Dekker C (1988) Electronic structure of atomically resolved carbon nanotubes. Nature 391:59–62CrossRef
Zurück zum Zitat Wu RJ, Huang YC, Yu MR, Lin TH, Hung SL (2008) Application of m-CNTs/NaClO4/Ppy to a fast response, room working temperature ethanol sensor. Sens Actuators B 134:213–218CrossRef Wu RJ, Huang YC, Yu MR, Lin TH, Hung SL (2008) Application of m-CNTs/NaClO4/Ppy to a fast response, room working temperature ethanol sensor. Sens Actuators B 134:213–218CrossRef
Zurück zum Zitat Zhang J, Boyd A, Tselev A, Paranjape M, Barbara P (2006) Mechanism of NO2 detection in carbon nanotube field effect transistor chemical sensors. Appl Phys Lett 88:123112CrossRef Zhang J, Boyd A, Tselev A, Paranjape M, Barbara P (2006) Mechanism of NO2 detection in carbon nanotube field effect transistor chemical sensors. Appl Phys Lett 88:123112CrossRef
Metadaten
Titel
Ethanol gas sensors based on multi-wall carbon nanotubes on oxidized Si substrate
verfasst von
S. J. Young
Z. D. Lin
Publikationsdatum
30.09.2016
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 1/2018
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-016-3154-2

Weitere Artikel der Ausgabe 1/2018

Microsystem Technologies 1/2018 Zur Ausgabe

Neuer Inhalt