3. Experimental Methods

This chapter covers modeling, simulations, and test techniques to successfully design and implement metamaterials for terahertz frequencies. Modeling and simulation of metamaterials is briefly covered in Sect. 3.1 with emphasis on the choice of boundary conditions to leverage the symmetry of metamaterial structures and thus dramatically reduce simulation time and solid-state memory requirements. Section 3.2 covers fabrication techniques using commercial foundry process with 45 nm CMOS technology as an example. Few case studies on terahertz metamaterials are covered to showcase the power of using commercial semiconductor process for designing terahertz metamaterials. Finally, Sect. 3.3 covers test and characterization methods in detail to give the reader a solid background on characterizing terahertz metamaterials.