Skip to main content
Fachgebiete
Automobil + Motoren Bauwesen + Immobilien Business IT + Informatik Elektrotechnik + Elektronik Energie + Nachhaltigkeit Finance + Banking Management + Führung Marketing + Vertrieb Maschinenbau + Werkstoffe Versicherung + Risiko
DE
EN
Bücher
Zeitschriften
Themenseiten
Organisationspsychologie Projektmanagement Marketing Smart Manufacturing
Weitere Formate
Podcasts Webinare Technik Webinare Wirtschaft Kongresse Veranstaltungskalender Awards
Jetzt Einzelzugang starten
Zugang für Unternehmen
Referenzkunden
SLX-Digitalkonferenz: Zukunftswerkstatt 2024

Mehr Umsatz mit Top-Kontakten

Am 7. Mai erfahren Sie, wie Vertriebsteams Leadgenerierung, Leadnurturing und Leadstrategien effizient steuern können.
Erweiterte Suche
Anmelden
nach oben
Microsystem Technologies
Erschienen in: Microsystem Technologies 12/2017

23.02.2017 | Technical Paper

Fabrication and performance characterization of miniature axial fans

verfasst von: Hamed Keramati, Weng-Kong Chan, Jianmin Miao

Erschienen in: Microsystem Technologies | Ausgabe 12/2017

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

This paper presents the fabrication and performance characterization of miniature axial fans that are developed using 2D blade profiles. 12 prototypes, with an outer diameter of 5 mm, having different blade angles and blade profiles were fabricated using UV photolithography with SU-8 as photoresist. Tests were conducted at 3 different speeds to examine the applicability of similarity laws. The results show that cambered profiles generated much higher pressure and flow rate as compared to a flat plate profile. For flat plate profiles, a maximum pressure of 0.55 Pa and a flow rate of 9.9 cm3/s are generated with a blade angle of 42° when the fan is operating at 20,000 rpm. This is much lower than that obtained by cambered profiles where a maximum pressure of 1.15 Pa and a flow rate of 14.6 cm3/s are generated with a blade angle of 60°. The effects of increasing blade number and blade angle have a positive effect on the flow rate delivered and pressure generated but the effects of increasing blade number is more effective in enhancing fan performance. The results also show that dynamic similarity is observed for rotational speeds of 15,000 and 20,000 rpm.
Vorheriger Artikel Deformation-based micro surface texturing using soft backing self-alignment for polymeric material
Nächster Artikel Nonlinear size-dependent dynamic buckling analysis of embedded micro cylindrical shells reinforced with agglomerated CNTs using strain gradient theory

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Jetzt informieren
Literatur
Chuang YJ, Tseng FG, Lin WK (2002) Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination. Microsyst Technol 8(4):308–313CrossRef
Epstein AH (2003) Millimeter-scale, mems gas turbine engines. In: Proceedings of ASME turbo expo 2003 power for land, sea, and air, Atlanta, USA, vol. 1, pp. 1–28
Fréchette LG, Jacobson SA, Ehrich FF, Ghodssi R, Khanna R, Wong CW, Zhang X, Schmidt MA, Epstein AH (2000) Demonstration of a microfabricated high-speed turbine supported on gas bearings. In: Proceedings of the 2000 solid state sensor and actuator workshop, Hilton Head Island SC, pp. 43–47, June 2000
Grimes R, Walsh EJ, Quin D, Davies MRD (2005) Effect of geometric scaling on aerodynamic performance. AIAA J 43(11):2293–2298CrossRef
Hsu CP et al (2007) Miniaturization of electrostatic fluid accelerators. J Microelectromech Syst 16(4):809–815CrossRef
Hsu CP, Jewell-Larsen NE, Sticht C, Mamishev A (2008) Heat transfer enhancement measurement for microfabricated electrostatic fluid accelerators. Department of Electrical Engineering, University of Washington, Washington, DCCrossRef
Jewell-Larsen NE, Parker DA, Krichtafovitch IA, Mamishev AV (2004) Numerical simulation and optimization of electrostatic air pumps. IEEE conference on electrical insulation and dielectric phenomena (CEIDP), Boulder CO, pp. 106–109, 2004
Jewell-Larsen NE, Zhang PQ, Hsu CP, Krichtafovitch IA, Mamishev AV (2006) Coupled-physics modeling of electrostatic fluid accelerators for forced convection cooling. In: 9th AIAA/ASME joint thermophysics and heat transfer conference, June 2006
Li J, Peterson GP, Cheng P (2004) Three-dimensional analysis of heat transfer in micro-heat sink with single phase flow. Int J Heat Mass Transf 47(19–20):4215–4231CrossRefMATH
Lorenz H, Despont M, Fahrni N, Brugger J, Vettiger P, Renaud P (1998) High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS. Sens Actuators A 64(1):33–39CrossRef
McCarthy M, Waits CM, Ghodssi R (2009) Dynamic friction and wear in a planar-contact encapsulated microball bearing using an integrated microturbine. J Microelectromech Syst 18(2):263–273CrossRef
Mehra A (1997) Computational investigation and design of low reynolds number micro-turbomachinery, S.M. thesis, Department of Aeronautics and Astronautics, Massachusetts Institute of Technology
Mehra A, Jacobson SA, Tan CS, Epstein AH (1998) Aerodynamic design considerations for the turbomachinery of a micro gas turbine engine. In: 25th national and 1st international conference on fluid mechanics and power, New Delhi, India
Mohamed MM (2006) Air cooling characteristics of a uniform square modules array for electronic device heat sink. Appl Therm Eng 26(5–6):486–493CrossRef
Mori R, Hanai K, Matsumoto Y (2005) Three dimensional microfabrication of photoresist and resin materials by using gray-scale lithography and molding. IEEJ Trans Sens Micromach 124(10):359–363CrossRef
Mouroulis P, Hartley FT, Wilson DW, White VE (2003) Blazed grating fabrication through gray-scale X-ray lithography. Opt Express 11(3):270–281CrossRef
Peele AG, Shew BY, Vora KD, Li HC (2005) Overcoming SU-8 stiction in high aspect ratio structures. Microsyst Technol 11(2):221–224CrossRef
Peles Y, Kosar A, Mishra C, Kuo CJ, Schneider B (2005) Forced convective heat transfer across a pin fin micro heat sink. Int J Heat Mass Transf 48(17):3615–3627CrossRefMATH
Qu W, Mudawar I (2002) Experimental and numerical study of pressure drop and heat transfer in single-phase micro-channel heat sink. Int J Heat Mass Transf 45(12):2549–2565CrossRef
Rammohan A, Dwivedi PK, Martinez-Duarte R, Katepalli H, Madou MJ, Sharma A (2011) One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8. Sens Actuators B Chem 153(1):125–134CrossRef
Tan FL, Tso CP (2004) Cooling of mobile electronic devices using phase change materials. Appl Therm Eng 24(2):159–169CrossRef
Tsai BJ, Wu CL (2007) Investigation of a miniature centrifugal fan. Appl Therm Eng 27(1):229–239CrossRef
Tuckerman DB, Pease RFW (1981) High-performance heat sinking for VLSI. IEEE Electron Device Lett 2(5):126–129CrossRef
Vora KD, Peele AG, Shew BY, Harvey EC, Hayes JP (2006) Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures. Microsyst Technol 13(5):487–493
Yang F, Jewell-Larsen NE, Brown DL, Parker DA (2003) Corona driven air propulsion for cooling of electronics. Int Symp High Voltage Eng, Delft
Zhang J, Tan KL, Gong HQ (2001) Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems(MEMS). Polym Test 20(6):693–701CrossRef
Zhang J, Chan-Park MB, Miao J, Sun T (2005) Reduction of diffraction effect for fabrication of very high aspect ratio microchannels in SU-8 over large area by soft cushion technology. Microsyst Technol 11(7):519–525CrossRef
Metadaten
Titel
Fabrication and performance characterization of miniature axial fans
verfasst von
Hamed Keramati
Weng-Kong Chan
Jianmin Miao
Publikationsdatum
23.02.2017
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 12/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-017-3332-x

Weitere Artikel der Ausgabe 12/2017

Microsystem Technologies 12/2017 Zur Ausgabe

Technical Paper

Design of VCM actuator with the chamfered edge magnet for cellphone

Technical Paper

Design and development of triple band ACS fed antenna with M and rectangular shaped radiating branches for 2.45/5 GHz wireless applications

Technical Paper

Size-dependent static stability of magneto-electro-elastic CNT/MT-based composite nanoshells under external electric and magnetic fields

Technical Paper

Nonlinear thermo-mechanical behaviour of MEMS resonators

Technical Paper

RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters

Technical Paper

A biocompatible and flexible polyimide for wireless sensors

Neuer Inhalt

    Bildnachweise