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Erschienen in:
Introduction Kapitel lesen Erstes Kapitel lesen

2014 | OriginalPaper | Buchkapitel

6. Fabrication of Micro-optical Components in Glass

verfasst von : Koji Sugioka, Ya Cheng

Erschienen in: Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications

Verlag: Springer London

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Abstract

Fabrication of optofluidic systems requires synergetic incorporation of micro-optical components in microfluidic networks. This chapter describes key techniques for fabricating optical waveguides and free-space micro-optical components in glass by femtosecond laser microprocessing, both of which are essential building blocks for optofluidic devices. It is straightforward to fabricate optical waveguides as femtosecond laser irradiation can change the refractive index of glass through multiphoton absorption in the focal volume. Free-space micro-optical components such as micromirrors and microlenses can be fabricated using femtosecond-laser-assisted wet chemical etching to form hollow structures with planar or curved surfaces in glass that serve as optical interfaces. Micro-attenuators can be embedded in glass with a high spatial resolution and controllable attenuations by synthesizing silver nanoparticles in photosensitive glass using femtosecond laser irradiation and subsequent heat treatment.

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Vorheriges Kapitel Fabrication of Fluid Control Microdevices
Nächstes Kapitel Selective Metallization of Glass
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Metadaten
Titel
Fabrication of Micro-optical Components in Glass
verfasst von
Koji Sugioka
Ya Cheng
Copyright-Jahr
2014
Verlag
Springer London
Buch
Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications

Print ISBN: 978-1-4471-5540-9

Electronic ISBN: 978-1-4471-5541-6

Copyright-Jahr: 2014

DOI
https://doi.org/10.1007/978-1-4471-5541-6_6

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