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2023 | OriginalPaper | Buchkapitel

FEM Analysis of Split Electrode IDTs Designed Lithium Tantalate-Polyaniline SAW Gas Sensor

verfasst von : Dhananjaya Panda, Koteswara Rao Peta

Erschienen in: Microactuators, Microsensors and Micromechanisms

Verlag: Springer International Publishing

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Abstract

The finite element method (FEM) underpinning COMSOL Multiphysics 6.0 has been used to model the sensing of various polar volatile organic compounds (VOCs) by the split electrode interdigital transducers (SEIDT) surface acoustic wave (SAW) sensor. On a LiTaO3 base, split-electrode interdigital transducers were employed with a sensing layer of polyaniline (PANI). Acetone VOC gas was detected using a SAW sensor at RT with a concentration of 100 ppm. After the gas specimen interacted with the detecting polymer, a change in the density of the sensing surface was seen, and with it, a change in the Rayleigh wave's Eigen frequency. For a number of studies, we measured admittance, displacement, quality factor, and electric potential versus frequency in addition to plotting the deformed shape at the Eigen (resonance) frequency. The S-parameter and quality factor studies also demonstrate the benefits of using split electrode IDTs in SAW sensors for lowering reflection loss.

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Metadaten
Titel
FEM Analysis of Split Electrode IDTs Designed Lithium Tantalate-Polyaniline SAW Gas Sensor
verfasst von
Dhananjaya Panda
Koteswara Rao Peta
Copyright-Jahr
2023
DOI
https://doi.org/10.1007/978-3-031-20353-4_20

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