Fluid and kinetic modeling for micromechanical structures

Micromechanical structures are structures which are at least partially mechanical in nature and function, which are very small (usually less than 1mm), and are produced using semiconductor fabrication technology. Micromechanical technology is a growing industry. The devices can be replicated cheaply and fast, and their small size saves space and offers flexibility (by integrating many devices). Micromachines are used both as sensors and actuators. Present applications include, for instance, accelerometers for air-bag deployment in automobiles and pressure sensors in medical and industrial applications. There are, in general, three aspects to simulating micromechanical structures; (i)The mechanical aspect, relating to bending and stress of the elements of the structure;(ii)The electromagnetic aspect when voltages are applied to either stimulate or sense the motion of the structure (piezoelectric, piezoresistive and capacitive effects), and(iii)The fluid or kinetic aspect, depending on the relative dimensions, which is present when liquid or gas are not evacuated from the region of mechanical motion.