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Erschienen in:
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2018 | OriginalPaper | Buchkapitel

High-Performance Acoustic Devices for Wireless Communication and Sensor Applications

verfasst von : Changjian Zhou, Xiangguang Tian, Tian-Ling Ren

Erschienen in: Micro Electro Mechanical Systems

Verlag: Springer Singapore

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Abstract

Surface acoustic wave (SAW) resonators and film bulk acoustic resonators (FBAR) are two of the most important passive resonators. After several decades of research and development, they are widely applied for wireless communications such as filters and duplexers, and broad sensing applications like pressure sensors, temperature sensors, gas sensors, biosensors, photoelectric sensors, and many others. In this chapter, we first introduce basic concepts and mainstream topics of SAW and FBAR devices. Then we give a detailed presentation of several methods to fabricate high-performance resonators including using multilayered structures and improved process. Flexible SAW and FBAR devices are also introduced. Several sensing applications are given afterwards. Finally, a summary and outlook is presented regarding the further improvement of device performance and new research fields.

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Metadaten
Titel
High-Performance Acoustic Devices for Wireless Communication and Sensor Applications
verfasst von
Changjian Zhou
Xiangguang Tian
Tian-Ling Ren
Copyright-Jahr
2018
Verlag
Springer Singapore
Buch
Micro Electro Mechanical Systems

Print ISBN: 978-981-10-5944-5

Electronic ISBN: 978-981-10-5945-2

Copyright-Jahr: 2018

DOI
https://doi.org/10.1007/978-981-10-5945-2_35

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