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Journal of Materials Science: Materials in Electronics
Erschienen in: Journal of Materials Science: Materials in Electronics 14/2019

15.06.2019

High-performance flexible transparent conductive thin films on PET substrates with a CuM/AZO structure

verfasst von: Yajie Li, Muying Wu, Yongtao Sun, Shihui Yu

Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 14/2019

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Abstract

Hybrid transparent conductive thin films (TCFs) with a bilayer structure composed of aluminum-doped zinc oxide (AZO) and Cu micro-mesh (CuM) are prepared on polyethylene terephthalate (PET) substrates. The AZO layers are deposited by RF magnetron sputtering at room temperature. The CuM is fabricated by UV-lithography and DC magnetron sputtering. The optical properties and conductivity can be modified by the thickness of CuM, and the conduction mechanism involving metal Cu–AZO carrier injection is proposed. The flexible CuM/AZO composite thin films exhibit outstanding optoelectronic performance, with the best figure of merit ≈ 1247 (at average optical transmittance of 85.8%, sheet resistance of 1.9 Ω/sq. and resistivity of 1.89 × 10−4 Ω·cm), as well as excellent mechanical flexibility. The resulting hybrid TCFs with CuM/AZO composite structure show potential applications in flexible electronics, organic light emitting diodes and photovoltaic devices.
Vorheriger Artikel Yttrium-substituted Mg–Zn ferrites: correlation of physical properties with Yttrium content
Nächster Artikel Comparative study of fabrication and characterization of Al-ZnO based Schottky barrier diodes using Pd and Au metal contacts

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Literatur
1.
C. Lohaus, C. Steinert, G. Deyu, J. Brötz, W. Jaegermann, A. Klein, Enhancing electrical conductivity of room temperature deposited Sn-doped In2O3 thin films by hematite seed layers. Appl. Phys. Lett. 112, 152105 (2018)CrossRef
2.
B.B. Sahu, W. Long, J.G. Han, Highly conductive flexible ultra thin ITO nanoclusters prepared by 3-D confined magnetron sputtering at a low temperature. Scr. Mater. 149, 98–102 (2018)CrossRef
3.
K.P. Sibin, N. Swain, P. Chowdhury, A. Dey, N. Sridhara, H.D. Shashikala, A.K. Sharma, H.C. Barshili, Optical and electrical properties of ITO thin films sputtered on flexible FEP substrate as passive thermal control system for space applications. Sol. Energy Mater. Sol. Cells 145, 314–322 (2016)CrossRef
4.
H. Koseoglu, F. Turkoglu, M. Kurt, M.D. Yaman, F.G. Akca, G. Aygun, L. Ozyuzer, Improvement of optical and electrical properties of ITO thin films by electro-annealing. Vacuum 120, 8–13 (2015)CrossRef
5.
S.H. Park, S.M. Lee, E.H. Ko, T.H. Kim, Y.C. Nah, S.J. Lee, J.H. Lee, H.K. Kim, Roll-to-Roll sputtered ITO/Cu/ITO multilayer electrode for flexible, transparent thin film heaters and electrochromic applications. Sci. Rep. 6, 33868 (2016)CrossRef
6.
J. Gwamuri, A. Vora, J. Mayandi, D.Ö. Güney, P.L. Bergstrom, J.M. Pearce, A new method of preparing highly conductive ultra-thin indium tin oxide for plasmonic-enhanced thin film solar photovoltaic devices. Sol. Energy Mater. Sol. Cells 149, 250–257 (2016)CrossRef
7.
S. Naghdi, K. Rhee, D. Hui, S. Park, A review of conductive metal nanomaterials as conductive, transparent, and flexible coatings, thin films, and conductive fillers: different deposition methods and applications. Coatings 8, 278 (2018)CrossRef
8.
C.F. Guo, Z. Ren, Flexible transparent conductors based on metal nanowire networks. Mater. Today 18, 143–154 (2015)CrossRef
9.
N.T. Son, J.S. Noh, S. Park, Role of ZnO thin film in the vertically aligned growth of ZnO nanorods by chemical bath deposition. Appl. Surf. Sci. 379, 440–445 (2016)CrossRef
10.
J. Kennedy, P.P. Murmu, J. Leveneur, A. Markwitz, J. Futter, Controlling preferred orientation and electrical conductivity of zinc oxide thin films by post growth annealing treatment. Appl. Surf. Sci. 367, 52–58 (2016)CrossRef
11.
L. Wen, M. Kumar, B.B. Sahu, S.B. Jin, C. Sawangrat, K. Leksakul, J.G. Han, Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films. Surf. Coat. Technol. 284, 85–89 (2015)CrossRef
12.
Y. Li, R. Yao, H. Wang, X. Wu, J. Wu, X. Wu, W. Qin, Enhanced performance in Al-doped ZnO based transparent flexible transparent thin-film transistors due to oxygen vacancy in ZnO film with Zn–Al–O interfaces fabricated by atomic layer deposition. ACS Appl. Mater. Interfaces 9, 11711–11720 (2017)CrossRef
13.
J. Yang, Y. Jiang, L. Li, M. Gao, Structural, morphological, optical and electrical properties of Ga-doped ZnO transparent conducting thin films. Appl. Surf. Sci. 421, 446–452 (2017)CrossRef
14.
R.H. Horng, S.L. Ou, C.Y. Huang, P. Ravadgar, C.I. Wu, Effects of Ga concentration and rapid thermal annealing on the structural, optoelectronic and photoluminescence properties of Ga-doped ZnO thin films. Thin Solid Films 605, 30–36 (2016)CrossRef
15.
M. Wang, L. Jiang, Y. Wang, E.J. Kim, S.H. Hahn, Growth mechanism of preferred crystallite orientation in transparent conducting ZnO: in thin films. J. Am. Ceram. Soc. 98, 3022–3028 (2015)CrossRef
16.
C.Y. Tsay, H.C. Cheng, Y.T. Tung, W.H. Tuan, C.K. Lin, Effect of Sn-doped on microstructural and optical properties of ZnO thin films deposited by sol–gel method. Thin Solid Films 517, 1032–1036 (2008)CrossRef
17.
M. Wu, S. Yu, L. He, G. Zhang, D. Ling, W. Zhang, Influence of oxygen pressure on the structural, electrical and optical properties of Nb-doped ZnO thin films prepared by pulsed laser deposition. Appl. Surf. Sci. 292, 219–224 (2014)CrossRef
18.
M. Wu, S. Yu, G. Chen, L. He, L. Yang, W. Zhang, Structural, optical, and electrical properties of Mo-doped ZnO thin films prepared by magnetron sputtering. Appl. Surf. Sci. 324, 791–796 (2015)CrossRef
19.
S. Yu, B. Zhu, H. Zheng, L. Li, S. Chen, M. Lei, Effect of oxygen pressure performance of PZO thin films deposited by pulsed laser deposition at low temperature. J. Alloys Compd. 727, 1273–1279 (2017)CrossRef
20.
S. Yu, W. Zhang, L. Li, H. Dong, D. Xu, Y. Jin, Structural, electrical, photoluminescence and optical properties of n–type conducting, phosphorus-doped ZnO thin films prepared by pulsed laser deposition. Appl. Surf. Sci. 298, 44–49 (2014)CrossRef
21.
S. Fernandez, F.B. Naranjo, Optimization of aluminum-doped zinc oxide films deposited at low temperature by radio-frequency sputtering on flexible substrates for solar cell applications. Sol. Energy Mater. Sol. Cells 94, 157–163 (2010)CrossRef
22.
Y. Xia, P. Wang, G. He, M. Zhang, S. Shi, Y. Liu, Z. Sun, Microstructure, opotoelectrical and pre-strain dependent electrical properties of AZO films on flexible glass substrates for flexible electronics. Surf. Coat. Technol. 320, 34–38 (2017)CrossRef
23.
H.R. Choi, S.K. Eswaran, S.M. Lee, Y.S. Cho, Enhanced fracture resistance of flexible ZnO: Al thin films in situ sputtered on bent polymer substrates. ACS Appl. Mater. Interfaces 7, 17569–17572 (2015)CrossRef
24.
G. Torrisi, I. Crupi, S. Mirabella, A. Terrasi, Robustness and electrical reliability of AZO/Ag/AZO thin film after bending stress. Sol. Energy Mater. Sol. Cells 165, 88–93 (2017)CrossRef
25.
S. Yu, Y. Liu, H. Zheng, L. Li, Y. Sun, Improved performance of transparent-conducting AZO/Cu/AZO multilayer thin films by inserting a metal Ti layer for flexible electronics. Opt. Lett. 42, 3020–3023 (2017)CrossRef
26.
H. Zhou, J. Xie, M. Mai, J. Wang, X. Shen, S. Wang, L. Zhang, K. Kisslinger, H.Q. Wang, J. Zhang, Y. Li, J. Deng, S. Ke, X. Zeng, High-ouality AZO/Au/AZO sandwich film with ultralow optical loss and resistivity for transparent flexible electrodes. ACS Appl. Mater. Interfaces 10, 16160–16168 (2018)CrossRef
27.
T.C. Lin, W.C. Huang, F.C. Tsai, The structural and electro-optical characteristics of AZO/Cr: Cu/AZO transparent conductive film. Thin Solid Films 589, 446–450 (2015)CrossRef
28.
S. Yu, L. Zhao, R. Liu, C. Zhang, H. Zheng, Y. Sun, L. Li, Performance enhancement of Cu-based AZO multilayer thin films via graphene fence engineering for organic solar cells. Sol. Energy Mater. Sol. Cells 183, 66–72 (2018)CrossRef
29.
K. Ellmer, Past achievements and future challenges in the development of optically transparent electrodes. Nat. Photonics 6, 809 (2012)CrossRef
30.
W.K. Kim, S. Lee, D.H. Lee, I.H. Park, J.S. Bae, T.W. Lee, J.Y. Kim, J.H. Park, Y.C. Cho, C.R. Cho, S.Y. Jeong, Cu mesh for flexible transparent conductive electrodes. Sci. Rep. 5, 10715 (2015)CrossRef
31.
Q. Huang, W. Shen, X. Fang, G. Chen, Y. Yang, J. Huang, R. Tan, W. Song, Highly thermostable, flexible, transparent, and conductive films on polyimide substrate with an AZO/AgNW/AZO structure. ACS Appl. Mater. Interfaces 7, 4299–4305 (2015)CrossRef
32.
B.J. Jeon, S. Lee, J.K. Lee, Adhesion characteristics of copper thin film deposited on PET substrate by electron cyclotron resonance-metal organic chemical vapor deposition. Surf. Coat. Technol. 202, 1839–1846 (2008)CrossRef
33.
V. Zardetto, T.M. Brown, A. Reale, A.D. Carlo, Substrates for flexible electronics: a practical investigation on the electrical, film flexibility, optical, temperature, and solvent resistance properties. J. Polym. Sci. B 49, 638–648 (2011)CrossRef
34.
K. Sakamoto, H. Kuwae, N. Kobayashi, A. Nobori, S. Shoji, J. Mizuno, Highly flexible transparent electrodes based on mesh-patterned rigid indium tin oxide. Sci. Rep. 8, 2825 (2018)CrossRef
35.
N. Joshi, V. Saxena, A. Singh, S.P. Koiry, A.K. Debnath, M.M. Chehimi, D.K. Aswal, S.K. Gupta, Flexible H2S sensor based on gold modified polycarbazole films. Sens. Actuators B 200, 227–234 (2014)CrossRef
36.
R.R. Zhao, M.S. Yu, G.C. Wang, W. Liu, T.L. Chen, Ultra-flexible and robust transparent electrodes by embedding silver nanowires into polyimide matrix. AIP Adv. 8, 065013 (2018)CrossRef
37.
D. Foti, Use of recycled waste pet bottles fibers for the reinforcement of concrete. Compos. Struct. 96, 396–404 (2013)CrossRef
38.
B. Ollivier, S.J. Dowey, S.J. Young, A. Matthews, Adhesion assessment of DLC films on PET using a simple tensile tester: comparison of different theories. J. Adhes. Sci. Technol. 9, 769–784 (1995)CrossRef
39.
W.G. Driscoll, W. Vaughan, Handbook of Optics (McGraw-Hill, New York, 1978)
40.
Y. Liu, Y.D. Qiao, G. Yang, Effect of thickness on the structural, morphological, electrical and optical properties of Nb plus Ta co-doped TiO2 films deposited by RF sputtering. Appl. Phys. A 124, 530 (2018)CrossRef
41.
W.H. Kim, W.J. Maeng, M.K. Kim, H. Kim, Low pressure chemical vapor deposition of aluminum-doped zinc oxide for transparent conducting electrodes. J. Electrochem. Soc. 158, D495–D499 (2011)CrossRef
42.
C. Weichan, L. Shuhua, Z. Xiao, W. Xianhui, Y. Xiaohong, Effect of Mo addition on microstructure and vacuum arc characteristics of CuCr50 alloy. Vacuum 85, 943–948 (2011)CrossRef
43.
G. Haacke, New figure of merit for transparent conductors. J. Appl. Phys. 47, 4086–4089 (1976)CrossRef
44.
B. Han, K. Pei, Y. Huang, X. Zhang, Q. Rong, Q. Lin, Y. Guo, T. Sun, C. Guo, D. Carnahan, M. Giersig, Y. Wang, J. Gao, Z. Ren, K. Kempa, Uniform self-forming metallic network as a high-performance transparent conductive electrode. Adv. Mater. 26, 873–877 (2014)CrossRef
45.
H.J. Choi, S.G. Yoon, J.H. Lee, J.Y. Lee, Crystallized indium-tin oxide (ITO) thin films grown at low temperature onto flexible polymer substrates. ECS J. Solid State Sci. Technol. 1, Q106–Q109 (2012)CrossRef
46.
K.S. Tseng, Y.L. Lo, Effect of sputtering parameters on optical and electrical properties of ITO films on PET substrates. Appl. Surf. Sci. 285, 157–166 (2013)CrossRef
47.
F. Mirri, A.W.K. Ma, T.T. Hsu, N. Behabtu, S.L. Eichmann, C.C. Young, D.E. Tsentalovich, M. Pasquali, High-performance carbon nanotube transparent conductive films by scalable dip coating. ACS Nano 6, 9737–9744 (2012)CrossRef
48.
D.S. Hecht, A.M. Heintz, R. Lee, L. Hu, B. Moore, C. Cucksey, S. Risser, High conductivity transparent carbon nanotube films deposited from superacid. Nanotechnology 22, 075201 (2011)CrossRef
49.
C. Cai, F. Jia, A. Li, F. Huang, Z. Xu, L. Qiu, Y. Chen, G. Fei, M. Wang, Crackless transfer of large-area graphene films for superior-performance transparent electrodes. Carbon 98, 457–462 (2016)CrossRef
50.
Y. Zhang, J. Guo, D. Xu, Y. Sun, F. Yan, One-pot synthesis and purification of ultralong silver nanowires for flexible transparent conductive electrodes. ACS Appl. Mater. Interaces 9, 25465–25473 (2017)CrossRef
51.
Y. Jiang, J. Xi, Z. Wu, H. Dong, Z. Zhao, B. Jiao, X. Hou, Highly transparent, conductive, flexible resin films embedded with silver nanowires. Langmuir 31, 4950–4957 (2015)CrossRef
52.
H.C. Chu, Y.C. Chang, Y. Lin, S.H. Chang, W.C. Chang, G.A. Li, H.Y. Tuan, Spray-deposited large-area copper nanowire transparent conductive electrodes and their uses for touch screen applications. ACS Appl. Mater. Interfaces 8, 13009–13017 (2016)CrossRef
53.
Z. Yin, S.K. Song, D.J. You, Y. Ko, S. Cho, J. Yoo, S.Y. Park, Y. Piao, S.T. Chang, Y.S. Kim, Novel synthesis, coating, and networking of curved copper nanowires for flexible transparent conductive electrodes. Small 11, 4576–4583 (2015)CrossRef
54.
C. Wu, T.W. Kim, F. Li, T. Guo, Wearable electricity generators fabricated utilizing transparent electronic textiles based on polyester/Ag nanowires/graphene core–shell nanocomposites. ACS Nano 10, 6449–6457 (2016)CrossRef
55.
Y. Ahn, Y. Jeong, D. Lee, Y. Lee, Copper nanowire–graphene core–shell nanostructure for highly stable transparent conducting electrodes. ACS Nano 9, 3125–3133 (2015)CrossRef
56.
Z. Zhu, T. Mankowski, K. Balakrishnan, A.S. Shikoh, F. Touati, M.A. Benammar, M. Mansuripur, C.M. Falco, Ultrahigh aspect ratio copper-nanowire-based hybrid transparent conductive electrodes with PEDOT: PSS and reduced graphene oxide exhibiting reduced surface roughness and improved stability. ACS Appl. Mater. Interfaces 7, 16223–16230 (2015)CrossRef
57.
J. Han, S. Yuan, L. Liu, X. Qiu, H. Gong, X. Yang, C. Li, Y. Hao, B. Cao, Fully indium-free flexible Ag nanowires/ZnO: F composite transparent conductive electrodes with high haze. J. Mater. Chem. A 3, 5375–5384 (2015)CrossRef
Metadaten
Titel
High-performance flexible transparent conductive thin films on PET substrates with a CuM/AZO structure
verfasst von
Yajie Li
Muying Wu
Yongtao Sun
Shihui Yu
Publikationsdatum
15.06.2019
Verlag
Springer US
Erschienen in
Journal of Materials Science: Materials in Electronics / Ausgabe 14/2019
Print ISSN: 0957-4522
Elektronische ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-019-01690-6

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