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Microsystem Technologies
Erschienen in: Microsystem Technologies 1/2015

01.01.2015 | Technical Paper

High temperature characteristic for wireless pressure LTCC-based sensor

verfasst von: Tan Qiulin, Kang Hao, Qin Li, Xiong Jijun, Liu Jun, Xue Chenyang, Zhang Wendong, Luo Tao

Erschienen in: Microsystem Technologies | Ausgabe 1/2015

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Abstract

The high temperature characteristic for pressure sensor based on low-temperature co-fired ceramic (LTCC) technology is researched. The Young’s modulus of LTCC DuPont 951 ceramic versus temperature is analysed theoretically. The sensor resonant frequency is tested from room temperature to 600 °C. Results show that resonant frequency drops nearly as a line. And the dropping of resonant frequency is mainly caused by the increase of LTCC material permittivity. A capacitor structure is proposed to reduce the change of frequency versus temperature and a compensation structure is proposed for the actual application. Moreover, the coupling effect between antenna and sensor fabricated using FERRO A6M-E and DuPont 951 is compared at 600 °C. Result shows that the material with lower dielectric loss and thermal conductivity is suggested to increase the temperature range of operation of sensor.
Vorheriger Artikel Fabrication of through substrate grooves on GaAs by deep wet etching and its application in GaAs CCD wafer level packaging
Nächster Artikel Suspended high Q integrated inductor by wafer level packaging technology

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Metadaten
Titel
High temperature characteristic for wireless pressure LTCC-based sensor
verfasst von
Tan Qiulin
Kang Hao
Qin Li
Xiong Jijun
Liu Jun
Xue Chenyang
Zhang Wendong
Luo Tao
Publikationsdatum
01.01.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 1/2015
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2106-y

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