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Erschienen in: Journal of Coatings Technology and Research 2/2019

05.10.2018

Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD

verfasst von: Dennis Kirchheim, Stefan Wilski, Montgomery Jaritz, Felix Mitschker, Moritz Oberberg, Jan Trieschmann, Lars Banko, Markus Brochhagen, Rabea Schreckenberg, Christian Hopmann, Marc Böke, Jan Benedikt, Teresa de los Arcos, Guido Grundmeier, Dario Grochla, Alfred Ludwig, Thomas Mussenbrock, Ralf Peter Brinkmann, Peter Awakowicz, Rainer Dahlmann

Erschienen in: Journal of Coatings Technology and Research | Ausgabe 2/2019

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Abstract

Plasma reactors for the application of silicon oxide coatings (SiOx) are often customized to optimize the processes regarding substrate properties and targeted functionalities. The design of these reactors is often based on qualitative considerations. This paper evaluates the use of a numerical, free simulation software for continuous mechanical problems (OpenFOAM) as a tool to evaluate reactor design options. As demonstrator for this purpose serves a given reactor for large-area pulsed microwave plasmas with a precursor inlet in the form of a shower ring. Previous results indicate that the shower ring may lead to an inhomogeneity in plasma and coatings properties along the substrate surface. Thus, a new precursor inlet design shall be developed. For this, the distribution of the process gases in the reactor for a variety of gas inlet designs and gas flows was simulated and a design chosen based on the results. The reactor was modified accordingly, and the simulations correlated with experimental results of plasma and coating properties. The results show that, despite many simplifications, a simulation of the neutral gas distribution using an open-access software can be a viable tool to support reactor and process design development.
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Metadaten
Titel
Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD
verfasst von
Dennis Kirchheim
Stefan Wilski
Montgomery Jaritz
Felix Mitschker
Moritz Oberberg
Jan Trieschmann
Lars Banko
Markus Brochhagen
Rabea Schreckenberg
Christian Hopmann
Marc Böke
Jan Benedikt
Teresa de los Arcos
Guido Grundmeier
Dario Grochla
Alfred Ludwig
Thomas Mussenbrock
Ralf Peter Brinkmann
Peter Awakowicz
Rainer Dahlmann
Publikationsdatum
05.10.2018
Verlag
Springer US
Erschienen in
Journal of Coatings Technology and Research / Ausgabe 2/2019
Print ISSN: 1547-0091
Elektronische ISSN: 1935-3804
DOI
https://doi.org/10.1007/s11998-018-0138-4

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