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Erschienen in: Microsystem Technologies 1/2015

01.01.2015 | Technical Paper

Improvement of measurement sensitivity near contact in intensity-interferometry flying height testers

verfasst von: Korakoch Phetdee, Alongkorn Pimpin, Werayut Srituravanich

Erschienen in: Microsystem Technologies | Ausgabe 1/2015

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Abstract

In the hard disk drive, the spacing between the read/write head and the magnetic disk or flying height has been greatly reduced to a few nanometers to achieve ultrahigh-density magnetic storage. At flying heights below 10 nm, intensity-interferometry flying height tester, the major technique for flying height measurement suffers from low measurement sensitivity. This paper reports a simple and inexpensive method to improve the sensitivity of intensity-interferometry method for measuring flying heights down to contact by using a glass disk coated with multiple layers of silicon and diamond-like carbon (DLC) films. The optimum film thicknesses were selected in order to improve the measurement sensitivity by theoretically analyzing the light interference at the head-disk interface. The improved sensitivity was confirmed in experiments performed in a flying height tester. It was found that the measurement sensitivity at very low flying heights (0–20 nm) was improved by 85 % using a glass disk coated with four layers: Si1 of 1 nm, DLC1 of 55 nm, Si2 of 3 nm and DLC2 of 25 nm. The proposed method not only significantly improves the sensitivity, but it also considerably increases the durability of glass disks promising the application of the intensity-interferometry flying height tester for measuring flying heights down to contact.

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Metadaten
Titel
Improvement of measurement sensitivity near contact in intensity-interferometry flying height testers
verfasst von
Korakoch Phetdee
Alongkorn Pimpin
Werayut Srituravanich
Publikationsdatum
01.01.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 1/2015
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2146-3

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