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Erschienen in: Journal of Materials Science: Materials in Electronics 19/2018

02.08.2018

Improvement of thermal stability of antimony film by cerium addition for phase change memory application

verfasst von: Jianhao Zhang, Hua Zou, Yifeng Hu, Xiaoqin Zhu, Yuemei Sun, Zhitang Song

Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 19/2018

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Abstract

Compared with pure Antimony (Sb) materials, Cerium (Ce) doped Sb alloys is proved to be a promising candidate with better thermal stability for phase change memory application. In this paper, the Ce doped Sb films were synthesized by magnetron sputtering. The crystallization temperature (Tc), activation energy (Ea) and the temperature for 10 years data retention (Tten) all increased significantly by increasing Ce dopants, meaning a much better thermal stability. These results may ascribe to disturbing crystallization process from the existence of Ce–Sb bond.

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Metadaten
Titel
Improvement of thermal stability of antimony film by cerium addition for phase change memory application
verfasst von
Jianhao Zhang
Hua Zou
Yifeng Hu
Xiaoqin Zhu
Yuemei Sun
Zhitang Song
Publikationsdatum
02.08.2018
Verlag
Springer US
Erschienen in
Journal of Materials Science: Materials in Electronics / Ausgabe 19/2018
Print ISSN: 0957-4522
Elektronische ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-018-9796-3

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