2015 | OriginalPaper | Buchkapitel
Initial Design of the Capacitive Micromachined Ultrasonic Transducers (CMUT) with Helmholtz Resonance Aperture
verfasst von : Xue Wen Cao, Bo Jin, Yuan Yu Yu, Jiu Jiang Wang, Sio Hang Pun, Mang I. Vai, Peng Un Mak
Erschienen in: 1st Global Conference on Biomedical Engineering & 9th Asian-Pacific Conference on Medical and Biological Engineering
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In this paper, we have demonstrated the performance improvement of the air-borne Capacitive Micromachined Ultrasonic Transducers (CMUT) in transmit mode using the Helmholtz resonance principles. The natural frequency of the resonance cavity, and the Helmholtz resonance frequency of the aperture which is formed in the center of membrane, were matched for resonance during the design. In order to verify the theoretical concept, Finite Element Analysis (FEA) simulation was performed using COMSOL software. Through the simulation comparison with the traditional CMUT, the proposed CMUT demonstrates the feasibility to improve the output acoustic pressure and SPL of the air-borne CMUT in transmit mode by combining the mechanical resonance theory with Helmholtz resonance principle.