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Erschienen in:
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2014 | OriginalPaper | Buchkapitel

8. Integration of Microcomponents

verfasst von : Koji Sugioka, Ya Cheng

Erschienen in: Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications

Verlag: Springer London

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Abstract

Various microcomponents, including microelectrodes and micro-optic and microfluidic components, can be fabricated in transparent materials by femtosecond laser direct writing. This chapter describes in detail techniques for integrating different types of microcomponents on a single substrate for constructing highly functional microfluidic, photonic, and optofluidic systems and devices. Several examples are described, including integration of microlenses and waveguides for beam collimation and focusing, integration of a micro-optical ring cavity and a microfluidic chamber for creating 3D microfluidic dye lasers, integration of microelectrodes and waveguide-based Mach–Zehnder interferometer in a lithium niobate (LiNbO3) crystal for constructing an optical modulator, and integration of micro-optic and microfluidic components in glass for optofluidic applications.

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Vorheriges Kapitel Selective Metallization of Glass
Nächstes Kapitel Applications of Biochips Fabricated by Femtosecond Lasers
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Metadaten
Titel
Integration of Microcomponents
verfasst von
Koji Sugioka
Ya Cheng
Copyright-Jahr
2014
Verlag
Springer London
Buch
Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications

Print ISBN: 978-1-4471-5540-9

Electronic ISBN: 978-1-4471-5541-6

Copyright-Jahr: 2014

DOI
https://doi.org/10.1007/978-1-4471-5541-6_8

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