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2016 | OriginalPaper | Buchkapitel

1. Introduction

verfasst von : Xiao-Sheng Zhang

Erschienen in: Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

Verlag: Springer Berlin Heidelberg

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Abstract

This chapter mainly reviews the development road map of micro-/nanointegrated fabrication technology as well as the previous research work of micro-/nanohierarchical structures. Consequently, the motivation, purpose, and innovative contributions of this thesis are briefly summarized.

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Nächstes Kapitel Micro-/Nanointegrated Fabrication Technique for Silicon
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Metadaten
Titel
Introduction
verfasst von
Xiao-Sheng Zhang
Copyright-Jahr
2016
Verlag
Springer Berlin Heidelberg
Buch
Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

Print ISBN: 978-3-662-48814-0

Electronic ISBN: 978-3-662-48816-4

Copyright-Jahr: 2016

DOI
https://doi.org/10.1007/978-3-662-48816-4_1

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