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Erschienen in: Journal of Materials Engineering and Performance 8/2018

03.07.2018

Investigation on Target Erosion and Effect of Deposition Rate on Microstructure and Properties of Sputtered Be Coating

verfasst von: Bingchi Luo, Jiqiang Zhang, Wenqi Li, Kai Li, Xuemin Wang, Weidong Wu

Erschienen in: Journal of Materials Engineering and Performance | Ausgabe 8/2018

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Abstract

The beryllium coatings were prepared by direct current magnetron sputtering at different powers. The target erosion rate was theoretically predicted on the basis of the conservation of electric charge and mass. The experiment based on weighing method was performed, which verified the theoretical prediction. XRD analysis reveals that the sputter coatings mainly consist of α-Be phase. On increasing deposition rates, the surface morphology shows a transition from a regular equiaxed grain to a cauliflower-like polygrain owing to the irregular arrangement of atoms and bulk diffusion enhancement originating from the sputtering thermal effect. A heterogeneous particulate-induced growth was observed and derived from fallen scrap during the sputtering process. The surface roughness displays a power function with the thickness increment, while the electrical resistivity is reversed with the grain size.

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Metadaten
Titel
Investigation on Target Erosion and Effect of Deposition Rate on Microstructure and Properties of Sputtered Be Coating
verfasst von
Bingchi Luo
Jiqiang Zhang
Wenqi Li
Kai Li
Xuemin Wang
Weidong Wu
Publikationsdatum
03.07.2018
Verlag
Springer US
Erschienen in
Journal of Materials Engineering and Performance / Ausgabe 8/2018
Print ISSN: 1059-9495
Elektronische ISSN: 1544-1024
DOI
https://doi.org/10.1007/s11665-018-3465-9

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