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2013 | OriginalPaper | Buchkapitel
7. Ion-Generated Damage
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Abstract
It has to be expected that both ions and electrons will damage specimens under examination to a greater or lesser degree. Electrons are low in mass but can travel at velocities which are a significant fraction of the speed of light. In general, electrons do not significantly damage metallic or inorganic specimens, but even relatively low doses of electrons can be expected to chemically alter or destroy organic materials such as polymers and biological samples.