Ausgabe 10/2003
Inhalt (22 Artikel)
Study of electron-scattering mechanism in nanoscale Cu interconnects
Choong-Un Kim, Jaeyong Park, Nancy Michael, Paul Gillespie, Rod Augur
Electromigration failure in ultra-fine copper interconnects
Nancy L. Michael, Choong-Un Kim, Paul Gillespie, Rod Augur
TaN-TiN binary alloys and superlattices as diffusion barriers for copper interconnects
H. Wang, A. Gupta, Ashutosh Tiwari, X. Zhang, J. Narayan
Thermomechanical response and stress analysis of copper interconnects
E. S. Ege, Y. -L. Shen
Effect of stresses on the evolution of annealing textures in Cu and Al interconnects
Dong Nyung Lee, Hyo Jong Lee
In-situ nanoindentation of epitaxial TiN/MgO (001) in a transmission electron microscope
A. M. Minor, E. A. Stach, J. W. Morris Jr., I. Petrov
Effect of multistep annealing on mechanical and surface properties of electroplated Cu thin films
A. K. Sikder, Ashok Kumar, P. Shukla, P. B. Zantye, M. Sanganaria
Silicon nitride processing for control of optical and electronic properties of silicon solar cells
Bhushan Sopori
Light emission from silicon: Some perspectives and applications
A. T. Fiory, N. M. Ravindra
Modeling and simulation of emissivity of silicon-related materials and structures
N. M. Ravindra, Krshna Ravindra, Sundaresh Mahendra, Bhushan Sopori, Anthony T. Fiory
Deformation and interfacial sliding in back-end interconnect structures in microelectronic devices
C. Park, I. Dutta, K. A. Peterson, J. Vella
Formation of nickel disilicide using nickel implantation and rapid thermal annealing
Chel-Jong Choi, Sung-Young Chang, Young-Woo Ok, Tae-Yeon Seong, H. Gan, G. Z. Pan, K. N. Tu
Properties of Bi-doped PbTe layers grown by liquid phase epitaxy under controlled Te vapor pressure
Wataru Tamura, Arata Yasuda, Ken Suto, Masasuke Hosokawa, Osamu Itoh, Jun-Ichi Nishizawa
Crystallization behavior and ferroelectric properties of PbTiO3/Ba0.85Sr0.15TiO3/PbTiO3 sandwich thin film on Pt/Ti/SiO2/Si substrates
Shaobo Liu, Yanqiu Li, Meidong Liu
Condensed phase equilibria in transition metal-Ga-Sb systems and predictions for thermally stable contacts to GaSb
W. E. Liu, S. E. Mohney
The impact of deep levels on the photocurrent transients in semi-insulating GaAs
M. Pavlović, B. Šantić, D. I. Desnica-Franković, N. Radić, T. Šmuc, U. V. Desnica
Self-limiting growth of ZrO2 films on a Si(100) substrate using ZrCl4 and O2 under atmospheric pressure
Naoyuki Takahashi, Naoki Yoshii, Shinichi Nonobe, Takato Nakamura, Masayuki Yoshioka
The microstructures and mechanical properties of the Sn-Zn-Ag-Al-Ga solder alloys—The effect of Ga
Kang-I Chen, Kwang-Lung Lin
Plasma cleaning of the flex substrate for flip-chip bonding with anisotropic conductive adhesive film
M. A. Uddin, M. O. Alam, Y. C. Chan, H. P. Chan
Recent progress of (Ba,Sr)TiO3 thin films for tunable microwave devices
Xinhua Zhu, Jianmin Zhu, Shunhua Zhou, Zhiguo Liu, Naiben Ming, Shengguo Lu, Helen Lai-Wah Chan, Chung-Loong Choy
Influence of H2- and N2-ambient annealing of indium-tin oxide film on plastic substrate for organic light-emitting diode
C. J. Huang, W. C. Shih