2001 | OriginalPaper | Buchkapitel
Pressure Sensors for Automotive Applications — with New One Chip EPROM Technology
verfasst von : R. Schmidt, T. Sakai, K. Ueyanagi
Erschienen in: Advanced Microsystems for Automotive Applications 2001
Verlag: Springer Berlin Heidelberg
Enthalten in: Professional Book Archive
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Semiconductor pressure sensors have been applied widely in various fields, for example, automobile, medical or industrial use. The requests for small size, low cost, highly accurate and reliable pressure sensors have been increasedThe pressure sensor composed of a silicon diaphragm with piezoresistors, a CMOS amplifier and 48 bit EPROM for digital trimming is combining all mentioned characteristics in the same chip. A high accuracy solution by calibration after assembled can be realised. This new EPROM pressure sensor is suitable for a wide range of applications. Especially in the automotive field where demand of sensors is increasing. For example to achieve low emissions and cleaner exhaust gas to comply with environmental regulations, or sensors for the engine control unit and brake systems.