Abstract
Color marking of rough or smooth metal (Al, Cu, Ti) and semiconductor (Si) surfaces was realized via femtosecond laser fabrication of periodic surface nanorelief, representing one-dimensional diffraction gratings. Bright colors of the surface nanorelief, especially for longer electromagnetic wavelengths, were provided during marking through pre-determined variation of the laser incidence angle and the resulting change of the diffraction grating period. This coloration technique was demonstrated for the case of silicon and various metals to mark surfaces in any individual color with a controllable brightness level and almost without their accompanying chemical surface modification.
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References
J.E. Carey, C.H. Crouch, M. Shen, E. Mazur, Opt. Lett. 30, 1773 (2005)
P.G. Maloney, P. Smith, V. King et al., Appl. Opt. 49, 1065 (2010)
T.Y. Hwang, A.Y. Vorobyev, C. Guo, Opt. Express 19, A824 (2011)
A.Y. Vorobyev, C. Guo, Phys. Rev. B 72, 195422 (2005)
K. Paivasaari, J.J.J. Kaakkunen, M. Kuittinen et al., Opt. Express 15, 13838 (2007)
Y. Yang, J. Yang, C. Liang, H. Wang, Opt. Express 16, 11259 (2008)
Y. Liu, S. Liu, Y. Wang, G. Feng, J. Zhu, L. Zhao, Laser Phys. 18, 1148 (2008)
A.Y. Vorobyev, C. Guo, Appl. Surf. Sci. 257, 7291 (2011)
A.Y. Vorobyev, C. Guo, Appl. Phys. Lett. 92, 041914 (2008)
A.Y. Vorobyev, C. Guo, J. Appl. Phys. 104, 053516 (2008)
E. Stratakis, V. Zorba, M. Barberoglou et al., Appl. Surf. Sci. 255, 5346 (2008)
E.V. Barmina, E. Stratakis, C. Fotakis, G.A. Shafeev, http://arxiv.org/ftp/arxiv/papers/1003/1003.2796.pdf
B. Dusser, Z. Sagan, H. Soder, N. Faure et al., Opt. Express 18, 2913 (2009)
V.P. Korolkov, A.A. Ionin, S.I. Kudryashov et al., Quantum Electron. 41, 387 (2011)
L. Guo, L. Xiao, Y. Hong, Q. Rong, H. Wen, Chin. Opt. Lett. 4, 72 (2011)
E.V. Golosov, A.A. Ionin, S.I. Kudryashov et al., Appl. Phys. A 104, 701 (2011)
H. Lochbihler, Opt. Express 17, 12189 (2009)
X. Li, C. Yuan, H. Yang, J. Li, W. Huang, D. Tang, Q. Xu, Appl. Surf. Sci. 256, 4344 (2010)
E.V. Golosov, A.A. Ionin, S.I. Kudryashov et al., Nanotechnol. Russ. 3–4, 237 (2011)
E.V. Golosov, A.A. Ionin, S.I. Kudryashov et al., Phys. Rev. B 83, 115426 (2011)
S.A. Akhmanov, V.I. Emel’yanov, N.I. Koroteev, V.N. Seminogov, Sov. Phys. Usp. 28, 1084 (1985)
S.I. Kudryashov, V.I. Emel’yanov, JETP Lett. 73, 228 (2001)
D.J. Hwang, C.P. Grigoropoulos, J. Appl. Phys. 99, 083101 (2006)
S. Lee, D. Yang, S. Nikumb, Appl. Surf. Sci. 254, 2996 (2008)
S.G. Gorny, G.V. Odintsova, A.V. Otkeeva, V.P. Veiko, Proc. SPIE 7996, 799605 (2011)
A.M. Prokhorov, V.A. Sychugov, A.V. Tischenko, A.A. Khakimov, Pis’ma Zh. Tekh. Fiz. 8, 961 (1982)
H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer, Berlin, 1988)
V.V. Klimov, Nanoplasmonics (Singapore, Pan Stanford, 2011)
S.I. Kudryashov, V.I. Emel’yanov, JETP Lett. 94, 94 (2002)
Acknowledgements
This work was supported by Russian Foundation for basic research (project nos. 10-08-00941-a, 11-02-01202-a, 11-08-01165-a, and 12-02-91001-ANF).
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Ionin, A.A., Kudryashov, S.I., Makarov, S.V. et al. Femtosecond laser color marking of metal and semiconductor surfaces. Appl. Phys. A 107, 301–305 (2012). https://doi.org/10.1007/s00339-012-6849-y
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DOI: https://doi.org/10.1007/s00339-012-6849-y