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One-step microfabrication of fused silica by laser ablation of an organic solution

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and an acetone solution containing pyrene at a concentration of 0.4 mol/dm3. The threshold fluence was 240 mJ/cm2, which is about one-fortieth lower than that obtained with conventional KrF laser ablation.

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Authors and Affiliations

  1. National Institute of Materials and Chemical Research, Higashi 1-1, Tsukuba, 305-8565 Ibaraki, Japan (Fax: +81-298-4474, E-mail: wangjun@nimc.go.jp, yabe@nimc.go.jp), , , , , , JP

    J. Wang, H. Niino & A. Yabe

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  1. J. Wang
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  2. H. Niino
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  3. A. Yabe
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Received: 7 September 1998/Accepted: 9 September 1998

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Wang, J., Niino, H. & Yabe, A. One-step microfabrication of fused silica by laser ablation of an organic solution . Appl Phys A 68, 111–113 (1999). https://doi.org/10.1007/s003390050863

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  • DOI: https://doi.org/10.1007/s003390050863

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