Abstract
In micro/nano manipulation mechanisms, the compliant z/tip/tilt stages have proved to have enormous advantages for out-of-plane positioning. Small workspace is a challenge in designing these out-of-plane positioning systems. This deficiency can be overcome significantly by a new insight into the optimization approach of a compliant mechanism that can be implemented easily on the entire structure of any spatial mechanism and/or any spatial mechanism with n-symmetrical spatial kinematic chains. Finite Element Method (FEM) adopted by the engineering software, ANSYS, is utilized to perform the structural optimization of an entire three-way symmetric spatial compliant mechanism to achieve the best performances and overcoming deficiencies. Therefore, this paper introduces a compliant monolithic three degrees of freedom (DOFs) z/tip/tilt piezo-driven micromanipulator with a comparable large workspace. Furthermore, as compact as 201 mm × 180 mm × 75 mm and made of Acrylonitrile Butadiene Styrene (ABS) with the first natural frequency of 115.42 Hz make this design superior in comparison to its peers. Regarding the structural aspects, three Scott-Russell and six leaf parallelogram mechanisms are employed to transform horizontal piezoelectric actuators’ inputs (PEAs) to vertical inputs and transfer them to the stage. The best performances of the proposed structure are achieved by optimizing the mechanism using FEM. Due to the optimization, a large amplification ratio of 5.3 is achieved. Moreover, finite element analyses and analytical modeling are performed to verify the performance of the proposed mechanism. Finally, in a comparative study, the captured workspace and resonant frequency of the proposed micromanipulator are compared against those available in theliterature and provide an insight into the performances of the proposed monolithic mechanism.
Similar content being viewed by others
References
Akbari S, Pirbodaghi T (2017) Precision positioning using a novel six axes compliant nano-manipulator. Microsyst Technol 23(7):2499–2507
Ghafarian M, Shirinzadeh B, Das T, Al-Jodah A, Wei W (2018) Design of a novel parallel monolithic 6-DOF compliant micromanipulation mechanism. In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics AIM, vol. 2018–July
Qin Y, Shirinzadeh B, Zhang D, Tian Y (2013) Design and Kinematics Modeling of a Novel 3-DOF Monolithic Manipulator Featuring Improved Scott-Russell Mechanisms. Journal of Mechanical Design 135(10):101004
Liaw HC, Shirinzadeh B (2009) Neural Network Motion Tracking Control of Piezo-Actuated Flexure-Based Mechanisms for Micro-/Nanomanipulation. IEEE/ASME Transactions on Mechatronics 14(5):517–527
Al-Jodah A, Shirinzadeh B, Ghafarian M, Kumar Das T, Tian Y, Zhang D (2019) A fuzzy disturbance observer based control approach for a novel 1-DOF micropositioning mechanism. Mechatronics 65:2020
Tian Y, Guo Z, Wang F, Li J, Zhang D (2013) Design and Experimental Investigation of a 2-DOF Planar Micro-Positioning Table. International Journal of Intelligent Mechatronics and Robotics, 3(2):39–54
Bhagat U, Shirinzadeh B, Clark L, Qin Y, Tian Y, Zhang D (2014) Experimental Investigation of Robust Motion Tracking Control for a 2-DOF Flexure-Based Mechanism. IEEE/ASME Transactions on Mechatronics 19(6):1737–1745
Lai LJ, Gu GY, Zhu LM (2012) Design and control of a decoupled two degree of freedom translational parallel micro-positioning stage. Review of Scientific Instruments 4:83
Xu Q (2014) Design and development of a compact Flexure-Based XY precision positioning system with centimeter range. IEEE Trans Ind Electron 61(2):893–903
Li Y, Xu Q (2009) Modeling and performance evaluation of a flexure-based XY parallel micromanipulator. Mech Mach Theory 44(12):2127–2152
Cai K, Tian Y, Wang F, Zhang D, Shirinzadeh B (2016) Development of a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism. Robotics and Computer-Integrated Manufacturing 37:125–138
Yao Q, Dong J, Ferreira PM (2007) Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage. International Journal of Machine Tools and Manufacture 47(6):946–961
Zhang X, Xu Q (2019) Design and analysis of a 2-DOF compliant gripper with constant-force flexure mechanism. Journal of Micro-Bio Robotics 15(1):31–42
Gao Z, Zhang D (2015) Performance Analysis, Mapping, and Multiobjective Optimization of a Hybrid Robotic Machine Tool. IEEE Trans Ind Electron 62(1):423–433
Zi B, Sun H, Zhang D (2017) Design, analysis and control of a winding hybrid-driven cable parallel manipulator. Robotics and Computer-Integrated Manufacturing 148:196–208
Ghafarian M, Shirinzadeh B, Al-Jodah A, Das TK, Wei W, Tian Y, Zhang D (2019) Design of a novel parallel monolithic 3-DOF compliant micromanipulator. In: Proceedings of MARSS 2019: 4th International Conference on Manipulation, Automation and Robotics at Small Scales
Ghafarian M, Shirinzadeh B, Tilok AAJ, Das K, Wei W, Tian Y, Zhang D (2020) An XYZ micromanipulator for precise positioning applications
Guo Z, Tian Y, Liu C, Wang F, Liu X, Shirinzadeh B, Zhang D (2015) Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning. Robotics and Computer-Integrated Manufacturing 32:93–105
Tian Y, Shirinzadeh B, Zhang D (2010) Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation. Microelectron Eng 87(2):230–241
Tian Y, Shirinzadeh B, Zhang D, Liu X, Chetwynd D (2009) Design and forward kinematics of the compliant micro-manipulator with lever mechanisms. Precis Eng 33(4):466–475
Huaxian W, Wei L, Yufei L, Yuqiao W, Xuefeng Y (2017) “Quasi-static analysis of a compliant tripod stage with plane compliant lever mechanism,” Proceedings of the Institution of Mechanical Engineers. Part C:, Journal of Mechanical Engineering Science 231(9):1639–1650
Pham MT, Yeo SH, Teo TJ, Wang P, Nai MLS (2019) Design and Optimization of a Three Degrees-of-Freedom Spatial Motion Compliant Parallel Mechanism With Fully Decoupled Motion Characteristics. Journal of Mechanisms and Robotics 11:1–8
Pham MT, Teo TJ, Yeo SH, Wang P, Nai MLS (2017) A 3D-printed Ti-6Al-4V 3-DOF compliant parallel mechanism for high precision manipulation. IEEE/ASME Transactions on Mechatronics 4435:1–10
Pham MT, Teo TJ, Yeo SH (2017) Synthesis of multiple degrees-of-freedom spatial-motion compliant parallel mechanisms with desired stiffness and dynamics characteristics. Precision Engineering 47:131–139
Chen G, Ding Y, Zhu X, Liu P (2018) Design and modeling of a compliant tip-tilt-piston micropositioning stage with a large rotation range. In: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, pp 1–14
Pinskier J, Shirinzadeh B (2018) Topology optimization of leaf flexures to maximize in-plane to out-of-plane compliance ratio. Precision Engineering 2019:397–407
Jin M, Zhang X (2016) A new topology optimization method for planar compliant parallel mechanisms. Mech Mach Theory 95:42–58
Li Y, Huang X, Xie YM, Zhou SW (2014) Evolutionary topology optimization of hinge-free compliant mechanisms. Int J Mech Sci 86:69–75
Swartz KE, James KA (2019) Gaussian layer connectivity parameterization: a new approach to topology optimization of Multi-Body mechanisms. Comput Aided Des 115:42–51
Wei H, Shirinzadeh B, Li W, Clark L, Pinskier J, Wang Y (2017) Development of piezo-driven compliant bridge mechanisms: general analytical equations and optimization of displacement amplification. Micromachines 8:8
Garaigordobil A, Ansola R, Veguería E., Fernandez I (2019) Overhang constraint for topology optimization of self-supported compliant mechanisms considering additive manufacturing. CAD Computer Aided Design 109:33–48
Zhu B, Chen Q, Jin M, Zhang X (2018) Design of fully decoupled compliant mechanisms with multiple degrees of freedom using topology optimization. Mechanism and Machine Theory 126:413–428
Hao G (2017) Determinate synthesis of symmetrical, monolithic tip-tilt-piston flexure stages. Journal of Mechanical Design, Transactions of the ASME 139(4):1–9
Clark L, Shirinzadeh B, Pinskier J, Tian Y, Zhang D (2018) Topology optimisation of bridge input structures with maximal amplification for design of flexure mechanisms. Mechanism and Machine Theory 122:113–131
Lum GZ, Teo TJ, Yeo SH, Yang G, Sitti M (2015) Structural optimization for flexure-based parallel mechanisms - Towards achieving optimal dynamic and stiffness properties. Precision Engineering 42:195–207
Sun Y, Yick KL, Yu W, Chen L, Lau N, Jiao W, Zhang S (2019) 3D Bra and human interactive modelling using finite element method for bra design. Comput Aided Des 114:13–27
Acknowledgment
This research is supported by the Australian Research Council (ARC), Discovery Project, and ARC LIEF Project.
Author information
Authors and Affiliations
Corresponding author
Additional information
Communicated by:Research Paper
Publisher’s Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Ghafarian, M., Shirinzadeh, B., Al-Jodah, A. et al. FEA-based optimization of a complete structure of a monolithic z/tip/tilt micromanipulator. J Micro-Bio Robot 16, 93–110 (2020). https://doi.org/10.1007/s12213-020-00133-4
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12213-020-00133-4