Abstract
In this chapter micromilling machines are presented, starting with a clear differentiation between ultraprecision milling machines and micromachines. The main characteristics of the micromilling process are also summarised, including size effects affecting milling at the micro scale and more usual applications. Furthermore, a more detailed description of the different subsystems and components specific for micromilling machines is shown: guideways, structural materials, drives, measuring systems, spindles and additional equipment. Finally some commercial micromilling machines from well-known machine tool builders are presented.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Alting L et al. (2003) Micro Engineering. Annals of the CIRP, 52/2:635–657
Basuray PK et al. (1977) Transition from Ploughing to Cutting during Machining with Blunt Tools. Wear, 43(3):341–349
Chuzhoy L et al. (2003) Machining Simulation of Ductile Iron and Its Constituents. J of Manufacturing Science and Engineering, 125(2):192–201
Dow T.A. et al. (2004) Tool force and deflection compensation for small milling tools. Precision Engineering, 28:31–45
Etxaniz I et al. (2005) Magnetic levitated 2D fast drive. LDIA Conf. 1:245–249
Etxaniz I et al. (2006) Design and manufacture of a spindle with magnetic bearings for high speed machining. CIRP 5th Int. Conf. on HSM, 1:355–360
Friedrich C (1998) Direct Fabrication of Deep X-Ray Lithography Masks by Micromechanical Milling. Precision Engineering, 22:164–173
Fujimasa I (1996) Micromachines – A new era in mechanical engineering. Oxford Science Publications
Herrero A et al. (2001) Development of a Three Axes Travelling Column Ultraprecision Milling Machine, Proc. of the 10th ICPE. Yokohama. Japan. 18–20 July
Kim CJ (2004). Mechanisms of Chip Formation and Cutting Dynamics in the Micro-Scale Milling Process. PhD Thesis, University of Michigan
Kussul EM et al. (1996) Micromechanical Engineering, A Basis for the Low-Cost Manufacturing of Mechanical Microdevices Using Microequipment. J of Micromechanics and Microengineering, 6(4):410–425
Lucca DA et al. (1993) Effect of tool edge geometry on energy dissipation in ultra-precision machining. Annals of the CIRP, 42:83–86
Masuzawa T (2000) State of the Art of Micromachining. Annals of the CIRP, 49/2
Schaller T (1999) Microstructure Grooves with a Width of Less than 50 Micrometer Cut with Ground Hard Metal Micro End Mills. Precision Engineering, 23 229–235
Schubert A et al. (2007) Improvement of micro-cutting accuracy by in-process application of 3D-sensors. EUSPEN Proc., Bremen, 368–371.
Slocum A (2003) Linear motion carriage with aerostatic bearings preloaded by inclined iron core linear electric motor. Precision Engineering, 27(1):382–394
Uriarte L et al. (2007) Error budget and stiffness chain assesment in a micromilling machine equipped with tools less than 0.3 mm in diameter. Precision Engineering, 31(1):1–12
Uriarte L et al. (2006) Comparison between microfabrication technologies for metal tooling.Proc. IMechE Vol. 220 Part C: J. Mechanical Engineering Science: 1665–1676
Vogler MP et al. (2003) Microstructure-Level Force Prediction Model for Micro-Milling of Multi-Phase Materials. J. of Manufacturing Science and Engineering, 125(2)
Vogler MP (2003) On the Modelling and Analysis of Machining Performance in Micro-EndMilling. PhD Thesis, University of Illinois at Urbana-Champaign
Weck M et al. (1997) Fabrication of Microcomponents Using Ultraprecision Machine Tools. Nanotechnology, 8:145–148
Weule H et al. (2001) Micro-Cutting of Steel to Meet New Requirements in Miniaturization. Annals of the CIRP, 50(1):61–64
Yuan ZJ et al. (1996) Effect of Diamond Tool Sharpness on Minimum Cutting Thickness and Cutting Surface Integrity in Ultraprecision Machining. J of Materials Processing Technology, 62(4) 327–330
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2009 Springer London
About this chapter
Cite this chapter
Uriarte, L., Eguía, J., Egaña, F. (2009). Micromilling Machines. In: López de Lacalle, L., Lamikiz, A. (eds) Machine Tools for High Performance Machining. Springer, London. https://doi.org/10.1007/978-1-84800-380-4_11
Download citation
DOI: https://doi.org/10.1007/978-1-84800-380-4_11
Publisher Name: Springer, London
Print ISBN: 978-1-84800-379-8
Online ISBN: 978-1-84800-380-4
eBook Packages: EngineeringEngineering (R0)