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Erschienen in:
Simple Alkoxide Based Precursor Systems Kapitel lesen Erstes Kapitel lesen

2013 | OriginalPaper | Buchkapitel

3. Mixed Metallo-organic Precursor Systems

verfasst von : Barbara Malič, Sebastjan Glinšek, Theodor Schneller, Marija Kosec

Erschienen in: Chemical Solution Deposition of Functional Oxide Thin Films

Verlag: Springer Vienna

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Abstract

Solution processing of functional oxides often starts with rather complex precursor systems consisting of metal alkoxides, carboxylates and/or nitrates dissolved, mixed and reacted (modified) in different solvents. Precursor systems of main functional perovskite groups are reviewed in this chapter. The breakthrough was achieved in mid-1980s, when the 2-methoxyethanol route was developed for processing of Pb(Zr,Ti)O3-based films, in which this ether alcohol is used as the solvent, acetates as the A-site and alkoxides as the B-site ion sources. Two other very popular routes are the diol-route, in which 1,3-propanediol is used as the solvent, and the so-called inverse-mixing-order route, in which the B-site cations are mixed first and the A-site source is added afterwards. In the alkali metals-based systems, such as Li(Nb,Ta)O3, (K,Na)(Nb,Ta)O3, and Na0.5Bi0.5TiO3, several methods have been developed in which different starting metallo-organic compounds have been used as the A-site metal sources, while mainly alkoxides have been employed as the B-site precursors. A variety of solvents can be used, such as methanol, ethanol, 2-methoxyethanol, 1,3-propanediol, as well as modifiers, for instance acetic acid, acetylacetone, and polyvinylpyrrolidone. Even water has been employed in some systems. The chapter concludes with the review of (Ba,Sr)TiO3-based precursor systems, mainly involving A-site carboxylates and stabilized Ti-alkoxides mixed in one of the above mentioned solvents.

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Vorheriges Kapitel Carboxylate Based Precursor Systems
Nächstes Kapitel Single Source Precursor Approach
Literatur
1.
Gurkovich S, Blum J (1984) Preparation of monolithic PbTiO3 by a sol-gel process. In: Hench L, Ulrich D (eds) Ultrastructure processing of ceramics, glasses and composites. Wiley, New York 152–160
2.
Budd K, Dey S, Payne D (1985) Sol-gel processing of PbTiO3, PbZrO3, PZT and PLZT thin films. Proc Br Ceramic Soc 36:107–121
3.
Tu YL, Calzada ML, Phillips NJ, Milne SJ (1996) Synthesis and electrical characterization of thin films of PT and PZT made from a diol-based sol-gel route. J Am Ceram Soc 79:441–448
4.
Yi G, Wu Z, Sayer M (1988) Preparation of Pb(Zr, Ti)O3 thin films by sol gel processing: electrical, optical, and electro-optic properties. J Appl Phys 64:2717–2724
5.
Assink R, Schwartz R (1993) 1H and 13C NMR investigations of lead zirconate titanate Pb(Zr, Ti)O3 thin-film precursor solutions. Chem Mater 5:511–517
6.
Brennecka GL, Ihlefeld JF, Maria JP, Tuttle BA, Clem PG (2010) Processing technologies for high-permittivity thin films in capacitor applications. J Am Ceram Soc 93:3935–3954
7.
Hasenkox U, Hoffmann S, Waser R (1998) Influence of precursor chemistry on the formation of MTiO3 (M = Ba, Sr) ceramic thin films. J Sol-Gel Sci Technol 12:67–79
8.
Hoffmann S, Waser R (1999) Control of the morphology of CSD-prepared (Ba,Sr)TiO3 thin films. J Eur Ceram Soc 19:1339–1343
9.
Jia C, Urban K, Hoffmann S, Waser R (1998) Microstructure of columnar-grained SrTiO3 and BaTiO3 thin films prepared by chemical solution deposition. J Mater Res 13:2206–2217
10.
Hoffmann S, Hasenkox U, Waser R, Jia C, Urban K (1997) Chemical solution deposited BaTiO3 and SrTiO3 thin films with columnar microstructure. MRS Proc 474:9–14
11.
Hayashi Y, Blum J (1987) Sol-gel derived PbTiO3. J Mater Sci 22:2655–2660
12.
Budd K, Dey S, Payne D (1986) The effect of hydrolysis conditions on the characteristics of PbTiO3 gels and thin films. MRS Proc 73:711–716
13.
Brinker CJ, Scherer GW (1990) Sol-gel science: the physics and chemistry of sol-gel processing. Academic, Boston
14.
Turova NY, Turevskaya EP, Kessler VG, Yanovskaya MI (2002) The chemistry of metal alkoxides. Kluwer, Boston
15.
Dekleva TW, Hayes JM, Cross LE, Geoffroy GL (1988) Sol–gel processing of lead titanate in 2-methoxyethanol: investigations into the nature of the prehydrolyzed solutions. J Am Ceram Soc 71:C.280–C.282
16.
Beltram T, Kosec M, Stavber S (1993) Reactions taking place during the sol-gel processing of PLZT. J Mater Res 28:313–320
17.
Carim AH, Tuttle BA, Doughty DH, Martinez SL (1991) Microstructure of solution-processed lead zirconate titanate (PZT) thin films. J Am Ceram Soc 74:1455–1458
18.
Dražič G, Beltram T, Kosec M (1994) Microstructural characterisation of sol-gel derived PLZT (9.5/65/35) thin films. Ferroelectrics 152:49–54
19.
Lakeman CDE, Xu Z, Payne DA (1995) On the evolution of structure and composition in sol-gel-derived lead zirconate titanate thin layers. J Mater Res 10:2042–2051
20.
Milne SJ, Pyke SH (1991) Modified sol-gel process for the production of lead titanate films. J Am Ceram Soc 74:1407–1410
21.
Tohge N, Takahashi S, Minami T (1991) Preparation of PbZrO3–PbTiO3 ferroelectric thin films by the sol–gel process. J Am Ceram Soc 74:67–71
22.
Sedlar M, Sayer M (1995) Reactivity of titanium isopropoxide, zirconium propoxide and niobium ethoxide in the system of 2-methoxyethanol, 2,4-pentanedione and water. J Sol-Gel Sci Technol 5:27–40
23.
Malič B, Arčon I, Kodre A, Kosec M (1999) EXAFS study of amorphous precursors for Pb(Zr,Ti)O3 ceramics. J Sol-Gel Sci Technol 16:135–141
24.
Sengupta SS, Ma L, Adler DL, Payne DA (1995) Extended X-ray absorption fine structure determination of local structure in sol-gel-derived lead titanate, lead zirconate, and lead zirconate titanate. J Mater Res 10:1345–1348
25.
Feth M, Weber A, Merkle R, Reinöhl U, Bertagnolli H (2003) Investigation of the crystallisation behaviour of lead titanate (PT), lead zirconate (PZ) and lead zirconate titanate (PZT) by EXAFS-spectroscopy and X-ray diffraction. J Sol-Gel Sci Technol 27:193–204
26.
Malič B, Kosec M, Arčon I, Kodre A, Hiboux S, Muralt P (2000) PZT thin films prepared from modified zirconium alkoxide. Integr Ferroelectr 30:81–89
27.
Malič B, Arčon I, Kodre A, Kosec M (2006) Homogeneity of Pb(Zr,Ti)O3 thin films by chemical solution deposition: extended X-ray absorption fine structure spectroscopy study of zirconium local environment. J Appl Phys 100:051612
28.
Nouwen R, Mullens J, Franco D, Yperman J, Van Poucke L (1996) Use of thermogravimetric analysis-Fourier transform infrared spectroscopy in the study of the reaction mechanism of the preparation of Pb(Zr,Ti)O3 by the sol-gel method. Vib Spetrosc 10:291–299
29.
Mandeljc M, Kosec M, Malič B, Samardzija Z (2000) Low temperature processing of lanthanum doped PZT thin films. Integr Ferroelectr 30:149–156
30.
Schneller T, Waser R (2007) Chemical modifications of Pb(Zr0.3,Ti0.7)O3 precursor solutions and their influence on the morphological and electrical properties of the resulting thin films. J Sol-Gel Sci Technol 42:337–352
31.
Udayakumar KR, Chen J, Schuele PJ, Cross LE, Kumar V, Krupanidhi SB (1992) Polarization reversal and high dielectric permittivity in lead magnesium niobate titanate thin films. Appl Phys Lett 60:1187–1189
32.
Shyu MJ, Hong TJ, Yang TJ, Wu TB (1995) Highly (100)-oriented thin films of sol-gel derived Pb[(Mg1/3Nb2/3)0.675Ti0.325]O3 prepared on textured LaNiO3 electrode. Jpn J Appl Phys 34:3647
33.
Fan H, Kim HE (2002) Microstructure and electrical properties of sol-gel derived Pb(Mg1/3Nb2/3)0.7Ti0.3O3 thin films with single perovskite phase. Jpn J Appl Phys 41:6768
34.
Swartz SL, Shrout TR (1982) Fabrication of perovskite lead magnesium niobate. Mater Res Bull 17:1245–1250
35.
Nagakari S, Kamigaki K, Nambu S (1996) Dielectric properties of sol-gel derived Pb(Mg1/3Nb2/3)O3-PbTiO3 thin films. Jpn J Appl Phys 35:4933–4935
36.
Härdtl KH, Rau H (1969) PbO vapour pressure in the Pb(ZrxTi1−x)O3 system. Solid State Commun 7:41–45
37.
Sato E, Huang Y, Kosec M, Bell A, Setter N (1994) Lead loss, preferred orientation, and the dielectric properties of sol-gel prepared lead titanate thin films. Appl Phys Lett 65:2678–2680
38.
Tani T, Payne DA (1994) Lead oxide coatings on sol–gel-derived lead lanthanum zirconium titanate thin layers for enhanced crystallization into the perovskite structure. J Am Ceram Soc 77:1242–1248
39.
Brennecka GL, Huebner W, Tuttle BA, Clem PG (2004) Use of stress to produce highly oriented tetragonal lead zirconate titanate (PZT 40/60) thin films and resulting electrical properties. J Am Ceram Soc 87:1459–1465
40.
Hirano SI, Kato K (1987) Synthesis of LiNbO3 by hydrolysis of metal alkoxides. Adv Ceram Mater 2:142–145
41.
Eichorst DJ, Payne DA, Wilson SR, Howard KE (1990) Crystal structure of LiNb(OCH2CH3)6. Inorg Chem 29:1458–1459
42.
Hirano SI, Kato K (1988) Preparation of crystalline LiNbO3 films with preffered orientation by hydrolysis of metal alkoxides. Adv Ceram Mater 3:503–506
43.
Joshi V, Mecartney ML (1993) The influence of water hydrolysis on microstructural development in sol-gel derived LiNbO3 thin film. J Mater Res 8:2668–2678
44.
Eichorst DJ, Payne DA (1988) Sol-gel processing of lithium niobate thin-layers on silicon. MRS Proc 121:773–778
45.
Derouin TA, Lakeman CDE, Wu XH, Speck JS, Lange FF (1997) Effect of lattice mismatch on the epitaxy of sol-gel LiNbO3 thin films. J Mater Res 12:1391–1400
46.
Prasada Rao AV, Paik DS, Komarneni S (1998) Sol-gel synthesis of lithium niobate powder and thin films using lithium 2,4-pentanedionate as lithium source. J Electroceram 2–3:157–162
47.
Hur NH, Park YK, Won DH, No K (1994) Effect of substrates on the growth and properties of LiNbO3 films by the sol-gel method. J Mater Res 9:980–985
48.
Nashimoto K, Moriyama H, Osakabe E (1996) Control of crystallinity in sol-gel derived epitaxial LiNbO3 thin films on sapphire. J Appl Phys 35:4936
49.
Ono S, Takeo T, Hirano SI (1996) Processing of highly oriented LiNbO3 films for waveguides from aqueous solution. J Am Ceram Soc 79:1343–1350
50.
Ono S, Hirano SI (1997) Synthesis of highly oriented lithium niobate thin film from neutralized aqueous precursor solution. J Am Ceram Soc 80:2869–2875
51.
Takahashi M, Yamauchi K, Yagi T, Nishiwaki A, Wakita K, Ohnishi N, Hotta K, Sahashi I (2004) Preparation and characterization of high-quality stoichiometric LiNbO3 thick films prepared by the sol–gel method. Thin Solid Films 458:108–113
52.
Takahashi M, Otowa R, Mori H, Sato S, Nishiwaki A, Wakita K, Ohnishi N, Yagi T, Uchida T (2004) Epitaxial growth and characterization of stoichiometric LiNbO3 films prepared by the sol-gel method. J Appl Phys 96:6569–6573
53.
Cheng SD, Zhou Y, Kam CH, Han XQ, Que WX, Lam YL, Chan YC, Oh JT, Gan WS (2000) LiTaO3 films with c-axis preferred orientation prepared on Si(111) substrate by sol-gel method. Mater Lett 44:125–128
54.
Ono S, Hirano SI (2002) Processing of highly oriented lithium tantalate films by chemical solution deposition. J Mater Res 17:2532–2538
55.
Retuert PJ, Kneuer PG, Wittke O, Avila RE, Piderit GJ (1995) Synthesis and characterization of LiTaO3 thin films deposited on Si by the sol-gel method. J Mater Res 20:2797–2800
56.
Uchida H, Onofuji K, Funakubo H, Koda S (2007) Characterization of zinc-modified lithium tantalate thin films fabricated by chemical solution deposition method. J Sol-Gel Sci Technol 42:265–269
57.
Tsuzuki A, Kani K, Watari K, Torii Y (1992) Preparation of magnesium-substituted LiTaO3 films by the sol-gel method. J Mater Sci Lett 11:1157–1159
58.
Kao MC, Lee MS, Wang CM, Chen HZ, Chen YC (2002) Properties of LiTaO3 thin films derived by a diol-based sol–gel process. Jpn J Appl Phys 41:2982–2986
59.
Cheng ZX, Kimura H, Ozawa K, Miyazaki A, Kanna CV (2005) Ferroelectric lithium tantalate thin film derived from peroxide. J Alloy Compd 402:208–212
60.
Hirano S, Yogo T, Kikuta K, Morishita T, Ito Y (1992) Preparation of potassium tantalate niobate by sol-gel method. J Am Ceram Soc 75:1701–1704
61.
Yogo T, Kikuta K, Ito Y, Hirano S (1995) Synthesis of highly oriented K(Ta,Nb)O3 (Ta:Nb = 65:35) film using metal alkoxides. J Am Ceram Soc 78:2175–2179
62.
Suzuki K, Sakamoto W, Yogo T, Hirano S (1999) Processing of oriented K(Ta,Nb)O3 films using chemical solution deposition. J Am Ceram Soc 82:1463–1466
63.
Nazeri A, Kahn M (1992) Preparation of KTaO3 and KNbO3 solid solutions through sol-gel processing. J Am Ceram Soc 75:2125–2133
64.
Nazeri A, Kahn H, Bender B, Allen C (1994) Microstructure of KTaxNb1-xO3 thin films on MgO (100) single crystals. J Am Ceram Soc 77:2450–2454
65.
Glinšek S, Arčon I, Malič B, Kodre A, Kosec M (2012) Structural evolution of the KTa0.6Nb0.4O3 alkoxide-based solutions: probing the transition metals local environment by X-ray absorption spectroscopy. J Sol-Gel Sci Technol 62:1–6
66.
Glinšek S, Malič B, Vukadinović M, Kužnik B, Kosec M (2009) Processing and electric field dependent dielectric properties of KTa0.6Nb0.4O3 thin films on alumina. Ferroelectrics 387:112–117
67.
Glinšek S, Malič B, Kutnjak Z, Wang H, Krupka J, Kosec M (2009) Dielectric properties of KTa0.6Nb0.4O3 thin films on alumina substrates prepared by chemical solution deposition. Appl Phys Lett 94:172905
68.
Buršík J, Drbohlav I, Vaněk P, Železný V (2004) Preparation of potassium tantalate thin films through chemical solution deposition. J Eur Ceram Soc 24:455–462
69.
Buršík J, Železný V, Vaněk P (2005) Preparation of potassium tantalate niobate thin films by chemical solution deposition and their characterization. J Eur Ceram Soc 25:2151–2154
70.
Ahn CW, Jeong ED, Lee SY, Lee HJ, Kang SH, Kim IW (2008) Enhanced ferroelectric properties of LiNbO3 substituted Na0.5K0.5NbO3 lead-free thin films grown by chemical solution deposition. Appl Phys Lett 93:212905
71.
Wu X, Wang L, Ren W, Yan X, Shi P, Chen X, Yao X (2008) Preparation and properties of (110) oriented lead-free sodium potassium niobate thin films by MOD method. Ferroelectrics 367:61–66
72.
Wang L, Yao K, Ren W (2008) Piezoelectric K0.5Na0.5NbO3 thick films derived from polyvinylpyrrolidone-modified chemical solution deposition. Appl Phys Lett 93:092903
73.
Goh PC, Yao K, Chen Z (2010) Lead-free piezoelectric K0.5Na0.5NbO3 thin films derived from chemical solution modified with stabilizing agents. Appl Phys Lett 97:102901
74.
Kupec A, Malič B, Tellier J, Tchernychova E, Glinšek S, Kosec M (2012) Lead-free ferroelectric potassium sodium niobate thin films from solution: composition and structure. J Am Ceram Soc 95:515–523
75.
Söderlind F, Käll P-O, Helmersson U (2005) Sol–gel synthesis and characterization of Na0.5K0.5NbO3 thin films. J Cryst Growth 281:468–474
76.
Tanaka K, Kakimoto KI, Ohsato H (2006) Fabrication of highly oriented lead-free (Na, K)NbO3 thin films at low temperature by sol–gel process. J Cryst Growth 294:209–213
77.
Lai F, Li JF (2007) Sol-gel processing of lead-free (Na,-K)NbO3 ferroelectric films. J Sol-Gel Sci Technol 42:287–292
78.
Goh PC, Yao K, Chen Z (2009) Titanium diffusion into (K0.5Na0.5)NbO3 thin films deposited on Pt/Ti/SiO2/Si substrates and corresponding effects. J Am Ceram Soc 92:1322–1327
79.
Chowdhury A, Bould J, Londesborough MGS, Večerníková E, Milne SJ (2010) Evidence of phase heterogeneity in sol–gel Na0.5K0.5NbO3 system. Mater Chem Phys 124:159–162
80.
Nakashima Y, Sakamoto W, Yogo T (2011) Processing of highly oriented (K,Na)NbO3 thin films using a tailored metal-alkoxide precursor solution. J Eur Ceram Soc 31:2497–2503
81.
Čakare-Samardžija L, Malič B, Kosec M (2008) K0.5Na0.5NbO3 thin films prepared by chemical solution deposition. Ferroelectrics 370:113–118
82.
Chowdhury A, Bould J, Londesborough MGS, Milne SJ (2010) Fundamental issues in the synthesis of ferroelectric Na0.5K0.5NbO3 thin films by sol−gel processing. Chem Mater 22:3862–3874
83.
Chowdhury A, Bould J, Londesborough MGS, Milne SJ (2011) The effect of refluxing on the alkoxide-based sodium potassium niobate sol–gel system: thermal and spectroscopic studies. J Solid State Chem 184:317–324
84.
Röscher M, Tappertzhofen S, Schneller T (2011) Precursor homogeneity and crystallization effects in chemical solution deposition-derived alkaline niobate thin films. J Am Ceram Soc 94:2193–2199
85.
Röscher M, Schneller T, Waser R (2010) Comments on the processing of the niobium component for chemical solution derived niobium oxide-based thin-films. J Sol-Gel Sci Technol 56:236–243
86.
Wang L, Yao K, Goh PC, Ren W (2009) Volatilization of alkali ions and effects of molecular weight of polyvinylpyrrolidone introduced in solution-derived ferroelectric K0.5Na0.5NbO3 films. J Mater Res 24:3516–3522
87.
Chowdhury A (2012) Recent developments in the area of sodium potassium niobate (NKN) thin films by chemical solution deposition methods. In: Huang XL, Ma SL (eds) Ferroelectrics: new research. Nova, New York
88.
Tang XG, Wang J, Wang XX, Chan HLW (2004) Preparation and electrical properties of highly (111)-oriented (Na0.5Bi0.5)TiO3 thin films by a sol-gel process. Chem Mater 16:5293–5294
89.
Yang CH, Wang Z, Li QX, Wang JH, Yang YG, Gu SL, Yang DM, Han JR (2005) Properties of Na0.5Bi0.5TiO3 ferroelectric films prepared by chemical solution decomposition. J Cryst Growth 284:136–141
90.
Xu J, Liu Y, Withers RL, Brink F, Yang H, Wang M (2008) Ferroelectric and non-linear dielectric characteristics of Bi0.5Na0.5TiO3 thin films deposited via a metallorganic decomposition process. J Appl Phys 104:116101
91.
Remondiere F, Malič B, Kosec M, Mercurio JP (2008) Study of the crystallization pathway of Na0.5Bi0.5TiO3 thin films obtained by chemical solution deposition. J Sol-Gel Sci Technol 46:117–125
92.
Kim CY, Sekino T, Yamamoto Y, Niihara K (2005) The synthesis of lead-free ferroelectric Bi1/2Na1/2TiO3 thin film by solution-sol–gel method. J Sol-Gel Sci Technol 33:307–308
93.
Bradley D, Mehrotra RC, Rothwell I, Singh A (2001) Alkoxo and aryloxo derivatives of metals. Academic, London
94.
Bretos I, Schneller T, Waser R, Hennings DF, Halder S, Thomas F (2010) Compositional substitutions and aliovalent doping of BaTiO3-based thin films on nickel foils prepared by chemical solution deposition. J Am Ceram Soc 93:506–515
95.
Malič B, Boerasu I, Mandeljc M, Kosec M, Sherman V, Yamada T, Setter N, Vukadinović M (2007) Processing and dielectric characterization of Ba0.3Sr0.7TiO3 thin films on alumina substrates. J Eur Ceram Soc 27:2945–2948
96.
Ihlefeld J, Laughlin B, Hunt-Lowery A, Borland W, Kingon A, Maria JP (2005) Copper compatible barium titanate thin films for embedded passives. J Electroceram 14:95–102
97.
Dawley J, Ong R, Clem P (2002) Chemical solution deposition of <100>-oriented SrTiO3 buffer layers on Ni substrates. J Mater Res 17:1678–1685
98.
Schwartz RW, Clem PG, Voigt JA, Byhoff ER, Stry M, Headley TJ, Missert NA (1999) Control of microstructure and orientation in solution-deposited BaTiO3 and SrTiO3 thin films. J Am Ceram Soc 82:2359–2367
99.
Wang F, Uusimaki A, Leppavuori S, Karmanenko S, Dedyk A, Sakharov V, Serenkov I (1998) Ba0.7Sr0.3Ti03 ferroelectric film prepared with the sol-gel process and its dielectric performance in planar capacitor structure. J Mater Res 13:1243–1248
100.
Sedlar M, Sayer M, Weaver L (1995) Sol-gel processing and properties of cerium doped barium strontium titanate thin films. J Sol-Gel Sci Technol 5:201–210
101.
Hoffmann S, Klee M, Waser R (1995) Structural and electrical properties of wet-chemically deposited Sr(Ti1-yZry)O3 (y = 0… 1) thin films. Integr Ferroelectr 10:155–164
102.
Schwartz RW, Schneller T, Waser R (2004) Chemical solution deposition of electronic oxide films. C R Chim 7:433–461
103.
Hennings D, Klee M, Waser R (1991) Advanced dielectrics: bulk ceramics and thin films. Adv Mater 3:334–340
104.
Halder S, Schneller T, Böttger U, Waser R (2005) Fabrication and electrical characterisation of Zr-substituted BaTiO3 thin films. Appl Phys A 81:25–29
105.
Dixit A, Majumder S, Savvinov A, Katiyar R, Guo R, Bhalla A (2002) Investigations on the sol–gel-derived barium zirconium titanate thin films. Mater Lett 56:933–940
106.
Hoffmann S, Waser RM (1997) Dielectric properties, leakage behaviour, and resistance degradation of thin films of the solid solution series Ba(Ti1-yZry)O3. Integr Ferroelectr 17:141–152
107.
Halder S, Schneller T, Waser R, Majumder S (2008) Electrical and optical properties of chemical solution deposited barium hafnate titanate thin films. Thin Solid Films 516:4970–4976
108.
Schneller T, Schober T (2003) Chemical solution deposition prepared dense proton conducting Y-doped BaZrO3 thin films for SOFC and sensor devices. Solid State Ionics 164:131–136
Metadaten
Titel
Mixed Metallo-organic Precursor Systems
verfasst von
Barbara Malič
Sebastjan Glinšek
Theodor Schneller
Marija Kosec
Copyright-Jahr
2013
Verlag
Springer Vienna
Buch
Chemical Solution Deposition of Functional Oxide Thin Films

Print ISBN: 978-3-211-99310-1

Electronic ISBN: 978-3-211-99311-8

Copyright-Jahr: 2013

DOI
https://doi.org/10.1007/978-3-211-99311-8_3

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