Skip to main content

Quantitative Electron Probe Microanalysis: New Accurate Φ (ρz) Description

  • Conference paper
Book cover Electron Microbeam Analysis

Part of the book series: Mikrochimica Acta ((MIKROCHIMICA,volume 12))

Abstract

This study presents a new method of matrix correction, combining atomic number and absorption correction [ZA]. The procedure requires an accurate knowledge of the Φ(ρz)-distribution with mass depth (ρz) of primary X-rays generated in the target. The Φ(ρz)-expression is evaluated using experimental measurements based on tracer layers and a theoretical approach involving the Monte Carlo method.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. R. Castaing, Thesis, University of Paris, Publication ONERA No. 55, 1951.

    Google Scholar 

  2. R. Castaing, and J. Deseamps, J. Phys. Rad. 1955, 16, 304.

    Article  CAS  Google Scholar 

  3. R. Castaing, and J. Henoc, in: Optique des Rayons X et Microanalyse, 4th Congres Int. (R. Castaing, P. Desehamps, J. Philibert, eds.), Hermann, Paris, 1965, p. 120.

    Google Scholar 

  4. R. Shimizu, K. Murata, G. Shinoda, in: Optique des Rayons X et Microanalyse, 4th Congres Int. (R. Castaing, P. Desehamps, J. Philibert, eds.), Hermann, Paris, 1965, p. 127.

    Google Scholar 

  5. J. D. Brown, Ph.D. Thesis, University of Maryland, U.S.A., 1966.

    Google Scholar 

  6. A. Vigne, G. Dez, J. Phys. D. 1968, 1,1309.

    Article  Google Scholar 

  7. J. D. Brown, L. Parobek, in: Proc. 6th Int. Conference on X-Ray Optics Microanal (G. Shinoda, K. Kohra, T. Ichinokawa, eds.), University of Tokyo Press, Tokyo, 1972, p. 163.

    Google Scholar 

  8. J. D. Brown, L. Parobek, X-Ray Spectrom. 1976,5,36.

    Article  CAS  Google Scholar 

  9. D. A. Sewell, G. Love, V. D. Scott, J. Phys. D. 1985, 18, 1233.

    Article  CAS  Google Scholar 

  10. P. Karduck, W. Rehbach, in: Microbeam Analysis (D. E. Newbury, ed.), San Francisco Press, San Francisco, 1988, p. 277.

    Google Scholar 

  11. J. Philibert, in: Proc. 3rd Int. Conference X-Ray Optics Microanal., (H. H. Patee, V. E. Cosslett, A. Engström, eds.), Academic, New York, 1963, p. 379.

    Google Scholar 

  12. S. Tanuma, K. Nagashima, Mikrochim. Acta [Wien] 1983, I, 299.

    Article  Google Scholar 

  13. S. Tanuma, K. Nagashima, Mikrochim. Acta [Wien] 1984, III, 265.

    Article  Google Scholar 

  14. D. A. Sewell, G. Love, V. D. Scott, J. Phys. D. 1985, 18, 1245.

    Article  CAS  Google Scholar 

  15. J. L. Pouchou, F. Pichoir, La Recherche Aèrospatiale, 1984,3, 167.

    Google Scholar 

  16. J. L Pouchou, F. Pichoir, in: 11th Int. Congress X-Ray Optics Microanal. J. D. Brown, R. H. Packwood 1986, p. 249.

    Google Scholar 

  17. J. L. Pouchou, F. Pichoir; in: Microbeam Analysis (D. E. Newbury, eds.), San Francisco Press, San Francisco, 1988, p. 315.

    Google Scholar 

  18. R. H. Packwood, J. D. Brown, X-Ray Spectrom. 1981,10, 138.

    Article  CAS  Google Scholar 

  19. G. F. Bastin, F. J. J. Van Loo, H. J. M. Heijligers, X-Ray Spectrom. 1984,13,91.

    Article  CAS  Google Scholar 

  20. G. F. Bastin, H. J. M. Heijligers, F. J. J. Van Loo, Scanning 1986,8,45.

    Article  CAS  Google Scholar 

  21. G. F. Bastin, H. J. M. Heijligers, Report Eindhoven University of Technology, The Netherlands 73, ISBN 90-6819-013-X 1990.

    Google Scholar 

  22. J. Tirira, M. del Giorgio, J. Riveros, X-Ray Spectrom. 1987, 16, 243.

    Article  Google Scholar 

  23. W. Rehbach, P. Karduck, in: Microbeam Analysis (D. E. Newbury, ed.), San Francisco Press, San Francisco, 1988, p. 285.

    Google Scholar 

  24. E. H. Darlington, J. Phys. D. 1975,8, 85.

    Article  CAS  Google Scholar 

  25. T. Matsukawa, R. Shimizu, H. Hashimoto, J. Phys. D. 1974, 7, 695.

    Article  CAS  Google Scholar 

  26. C. Merlet, X-Ray Spectrom. 1991 (accepted).

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 1992 Springer-Verlag Wien

About this paper

Cite this paper

Merlet, C. (1992). Quantitative Electron Probe Microanalysis: New Accurate Φ (ρz) Description. In: Boekestein, A., Pavićević, M.K. (eds) Electron Microbeam Analysis. Mikrochimica Acta, vol 12. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6679-6_8

Download citation

  • DOI: https://doi.org/10.1007/978-3-7091-6679-6_8

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-211-82359-0

  • Online ISBN: 978-3-7091-6679-6

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics