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Energy Dispersive X-ray Spectroscopy

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Analytical Electron Microscopy for Materials Science

Abstract

A typical analytical electron microscopic method (i.e., energy dispersive X-ray spectroscopy, or EDS, sometimes called EDX or EDXS) is described in this chapter. Although some improvement in the resolution of EDS has been attempted, there has been no significant modification introduced in the practice and application of EDS in comparison with electron energyloss spectroscopy (EELS). Still, this method is the most standard and reliable one in the field of analytical electron microscopy and is widely used.

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Authors and Affiliations

  1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-2-1 Katahira, Sendai, Miyagi, 980-8577, Japan

    Daisuke Shindo (Dr., Professor)

  2. Application and Research Center, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan

    Tetsuo Oikawa (Dr., Chief Researcher)

Authors
  1. Daisuke Shindo
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  2. Tetsuo Oikawa
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© 2002 Springer Japan

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Shindo, D., Oikawa, T. (2002). Energy Dispersive X-ray Spectroscopy. In: Analytical Electron Microscopy for Materials Science. Springer, Tokyo. https://doi.org/10.1007/978-4-431-66988-3_4

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  • DOI: https://doi.org/10.1007/978-4-431-66988-3_4

  • Publisher Name: Springer, Tokyo

  • Print ISBN: 978-4-431-70336-5

  • Online ISBN: 978-4-431-66988-3

  • eBook Packages: Springer Book Archive

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