Abstract
MEMS devices are currently made from single-crystal silicon, LPCVD polysilicon films and other ceramic films. For high temperature applications, SiC films are being developed to replace polysilicon films. Tribology in MEMS devices is of importance. Atomic force/friction force microscopy (AFM/FFM) and nanoindentation techniques have been used for tribological studies on microscale on materials of interest. These techniques have been used to study surface roughness, adhesion, friction, scratching/wear, indentation and boundary lubrication of bulk and treated silicon, polysilicon films and SiC films. Measurements of microscale and macroscale friction show that friction values on both scales of all the silicon samples are about the same and higher than that of SiC. The microscale values are lower than the macroscale values as there is less ploughing contribution in the microscale measurements. Surface roughness has an effect on friction. Microscratching, microwear and nanoindentation studies indicate that SiC films are superior to coated/treated silicon followed by bare silicon. Chemically bonded lubricants appear to be suitable for MEMS devices.
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References
Beerschwinger, U., Albrecht, T., Mathieson, D., Rueben, R.L., Yang, S.J. and Taghizadeh, M. (1995), “Wear at Microscopic Scales and Light Loads for MEMS Applications”, Wear 181–183, 426–435.
Bhushan, B. (1992), Mechanics and Reliability of Flexible Magnetic Media, Springer-Verlag, New York.
Bhushan, B. (1995), Handbook of Micro/nanotribology, CRC, Boca Raton, FL.
Bhushan, B. (1996a), Tribology and Mechanics of Magnetic Storage Devices, 2 nd edition, Springer, New York.
Bhushan,B. (1996b), “Nanotribology and Nanomechanics of MEMS Devices”, Proc. Ninth Annual Workshop on Micro Electro Mechanical Systems, pp. 91–98, IEEE, New York.
Bhushan, B., Dominiak, M. and Lazarri, J.P. (1992), “Contact Start-stop Studies with Silicon Planar Head Sliders Against Thin-film Disks”, IEEE Trans. Mag. 28, 2874–2876.
Bhushan, B. and Venkatesan, S. (1993a), “Mechanical and Tribological Properties of Silicon for Micromechanical Applications: A Review”, Adv. Info. Storage Sys. 5, 211–239.
Bhushan, B. and Venkatesan, S. (1993b), “Friction and Wear Studies of Silicon in Sliding Contact with Thin-film Magnetic Rigid Disks”, J. Mater. Res. 8, 1611–1628.
Bhushan B. and Koinkar, V.N. (1994). “Tribological Studies of Silicon for Magnetic Recording Applications”, J. Appl. Phys. 75, 5741–5746.
Bhushan, B., Israelachvili, J.N. and Landman, U. (1995a), “Nanotribology: Friction, Wear and Lubrication at the Atomic Scale”, Nature 374, 607–616.
Bhushan, B., Kulkami, A.V., Koinkar, V.N., Boehm, M., Odoni, L., Martelet, C. and Belin, M. (1995b), “Microtribological Characterization of Self-assembled and Langmuir Blodgett Monolayers by Atomic Force and Friction Force Microscopy”, Langmuir 11, 3189–3198.
Bhushan, B. and Gupta, B.K. (1997), Handbook of Tribology: Materials, Coatings and Surface Treatments, Krieger, Malabar, FL.
Bhushan, B. and Koinkar, V.N. (1997), “Microtribological Studies of Doped Single-crystal Silicon and Polysilicon Films for MEMS Devices”, Sensors and Actuators A 57, 91–102.
Bhushan, B. and Li, X. (1997), “Micromechanical and Tribological Characterization of Doped Single-crystal Silicon and Polysilicon Films for Microelectromechanical Systems”, J. Mater. Res. 12, 1–10.
Bryzek, J., Peterson, K. and McCulley, W. (1994), “Micromachines on the March”, IEEE Spectrum May, 20–31.
Deng, K., Collins, R.J., Mehregany, M. and Sukenik, C.N. (1995), “Performance Impact of Monolayer Coatings of Polysilicon Micromotors”, Proc. MEMS 95, Amsterdam, Netherlands, Jan-Feb.
Ericson, F. and Schweitz, J.A. (1990), “Micromechanical Fracture Strength of Silicon”, J. Appl. Phys. 68 5840–5844.
Fan, L.S., Ottesen, H.H., Reiley, T.C. and Wood, R.W. (1995), “Magnetic Recording Head Positioning at Very High Track Densities Using a Microactuator-based, Two-stage Servo System”, IEEE Trans. Industr. Electron. 42 222–233.
Fan, L.S. and Woodman, S. (1995), “Batch Fabrication of Mechanical Platforms for High-density Data Storage”, 8 th Int. Conf. Solid State Sensors and Actuators (Transducers ‘85)/Eurosensors IX, Stockholm, Sweden, 25–29 June, 434–437.
Fang, W. and Wickert, J.A. (1995), “Comments on Measuring Thin-film Stresses Using Bi-layer Micromachined Beams”, J. Micromech. Microeng. 5 276–281.
Fujimasa, L (1996), Micromachines: A New Era in Mechanical Engineering, Oxford University Press, Oxford, U.K.
Gabriel, K.J., Behi, F., Mahadevan, R. and Mehregany, M. (1990), “In Situ Friction and Wear Measurement in Integrated Polysilicon Mechanisms”, Sensors and Actuator, A 21–23 184–188.
Guckel, H. and Burns, D.W. (1989), “Fabrication of Micromechanical Devices from Polysilicon Films with Smooth Surfaces”, Sensors and Actuators 20 117–122.
Guckel, H., Bums, D., Rutigliano, C., Lovell, E. and Choi, B. (1992), “Diagnostic Microstructures for the Measurement of Intrinsic Strain in Thin Films”, J. Micromech. Microeng. 2 86–95.
Gupta, B.K., Chevallier, J. and Bhushan, B. (1993), “Tribology of Ion Bombarded Silicon for Micromechanical Applications”, ASMEJ. Tribol. 115 392–399.
Gupta, B.K. and Bhushan, B. (1994), “Modification of Tribological Properties of Silicon by Boron Ion Implantation”, Tribol. Trans. 37 601–607.
Hamilton, H. (1991), “Contact Recording on Perpendicular Rigid Media”, J. Mag. Soc. Jpn. 15 (Supp. 52) 483–481
Harris, G.L. (1995) (ed.), Properties of Silicon Carbide, Instn. of Elect. Eng., London.
Henck, S.A. (1997), “Lubrication of Digital Micromirror Devices”, Trib. Lett. 3 239–247.
Hokkirigawa, K. and Kato, K. (1988), “An Experimental and Theoretical Investigation of Ploughing, Cutting and Wedge Forming During Abrasive Wear”, Trib. Int. 21 51–57.
Hutchings, I.M. (1992), Tribology: Friction and Wear of Engineering Materials, CRC Press, Boca Raton, FL.
Jaeger, R.C. (1988), Introduction to Microelectronic Fabrication,Vol. 5, Addison-Wesley, reading, MA.
Koinkar, V.N. and Bhushan, B. (1996a), “Micro/nanoscale Studies of Boundary Layers of Liquid Lubricants for Magnetic Disks”, J. Appl. Phys. 79 8071–8075.
Koinkar, V.N. and Bhushan, B. (1996b), “Microtribological Studies of Unlubricated and Lubricated Surfaces Using Atomic Force/Friction Force Microscopy”, J. Vac. Sci. Technol. A14 2378–2391.
Koinkar, V.N. and Bhushan, B. (1997), “Scanning and Transmission Electron Microscopies of Single-crystal Silicon Microwom/Micromachined Using Atomic Force Microscopy”, J. Mater. Res. (in press).
Lazani, J.P. and Deroux-Dauphin, P. (1989), “A New Thin Film Head Generation IC Head”, IEEE Trans. Mag. 25 3190–3193.
Lim, M.G., Chang, J.C., Schultz, D.P., Howe, R.T. and White, R.M. (1990), “Polysilicon Microstructures to Characterize Static Friction”, Proc. IEEE Micro Electro Mechanical Systems, 82–88.
Mastrangelo, C.H. (1997), “Adhesion-related Failure Mechanisms in Micromechanical Devices”, Trib. Leu. 3, 233–238.
Mehregany, M., Howe, R.T. and Senturia, S.D. (1987), “Novel Microstructures for the In-situ Measurement of Mechanical Properties of Thin Films”, J. Appl. Phys. 62, 3579–3584.
Mehregany, M., Gabriel, K.J. and Trimmer, W.S.N. (1988), “Integrated Fabrication of Polysilicon Mechanisms”, IEEE Trans. Electron Dev. 35 (6), 719–723.
Miu, D.K. and Tai, Y.C. (1995), “Silicon Micromachined Scaled Technology”, IEEE Trans. Industr. Electron. 42, 234–239.
Ohwe, T., Mizoshita, Y. and Yonoeka, S. (1993), “Development of Integrated Suspension System for a Nanoslider with an MR Head Transducer”, IEEE Trans. Mag. 29, 3924–3926.
Schweitz, J.A. (1991), “A New and Simple Approach to the Stress-strain Characteristics of Thin Coatings”, J. Micromech. Microeng. 1, 10–15.
Shackelford, J.F., Alexander, W. and Park, J.S. (eds.) (1994), CRC Material Science and Engineering Handbook, 2 nd edition, CRC PRess, Boca Raton, FL.
Shor, J.S., Goldstein, D. and Kurtz, A.D. (1993), “Characterization of n-type (3-SiC as a Piezoresistor”, IEEE Trans. Electron Devices 40, 1093–1099.
Spencer, M.G., Devaty, R.P., Edmond, J.A., Khan, M.A., Kaplan, R. and Rahman, M. (1994) (eds.), SiC and Related Materials,Proc. Fifth Conf, Inst. of Physics Publishing Ltd., Bristol, U.K.
Tai, Y.C., Fan, L.S. and Muller, R.S. (1989), “IC-processed Micro-motors: Design, Technology and Testing”, Proc. IEEE Micro Electro Mechanical Systems,1–6.
Tai, Y.C. and Muller, R.S. (1990), “Frictional Study of IC Processed Micromotors”, Sensors and Actuators A 21–23, 180–183.
Tong, L., Mehregany, M. and Matus, L.G. (1992), “Mechanical Properties of 3C Silicon Carbide”, Appl. Phys. Lett. 60, 2992–2994.
Trimmer, W.S. (ed.) (1997), Micromachines and MEMS,Classic and Seminal Papers to 1990, IEEE Press, New York.
Venkatesan, S. and Bhushan, B. (1993), “The Role of Environment in the Friction and Wear of Single-crystal Silicon in Sliding Contact with Thin-film Magnetic Rigid Disks”, Adv. Info Storage Sys. 5, 241–257.
Venkatesan, S. and Bhushan, B. (1994), “The Sliding Friction and Wear Behavior of Single-crystal, Polycrystalline and Oxidized Silicon, Wear 171, 25–32.
Xu, J. and Bhushan, B., “Friction and Durability of Ceramic Slider Materials in Contact with Lubricated Thin-film Rigid Disks”, Proc. Instn. Mech. Engrs, Part J: J. Eng. Trib. (in press).
Zorman, C.A., Fleischmann, A.J., Dewa, A.S., Mehregany, M., Jacob, C., Nishino, S. and Pirouz, P. (1995), “Epitaxial Growth of 3C-SiC Films on 4 in. Diam Si(100) Silicon Wafers by Atmospheric Pressure Chemical Vapor Deposition”, J. Appl. Phys. 78, 5136–5138.
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Bhushan, B., Sundararajan, S., Li, X., Zorman, C.A., Mehregany, M. (1998). Micro/Nanotribological Studies of Single-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_29
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DOI: https://doi.org/10.1007/978-94-011-5050-7_29
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