Raman characterization of amorphous carbon films

Abstract

Amorphous carbon films, deposited with the LASER-ARC technique, have been characterized using Raman scattering experiments at an excitation wavelength of 633 nm provided by a He-Ne laser. To distinguish between the homogeneous amorphous film and incorporated particles area resolved measurements have been carried out due to the laser spot diameter of 1 μm. Typical diamondlike (DLC) films, grown near room temperature, show a broad Raman band between 1000 cm⁻¹ and 1800 cm⁻¹ fitted very well by two gaussian distributions. Films deposited at higher substrate temperatures reveal more graphitic features in the spectra. The spectra of particles consists of a graphite-like portion originated from the graphitic structure of the particle and a diamond-like portion caused by the covering DLC film. The degree of disorder and diamond-likeness in the film structure is quantified by the peak position, the full width at half maximum (FWHM) and intensity relation of the fitted “D”- and “G”-peaks.