Abstract
As-fired aluminium nitride (AIN) substrates with smooth and uniform surface have been developed by green sheet and firing technology. The effect of setting for firing on surface roughness was investigated. AIN substrates were fabricated by pressureless sintering of green sheets piled up and sandwiched between AIN plates in an AIN crucible. The thermal conductivity, surface roughness and bending strength of the substrate sintered at 1770 °C for 2 h under a pressure of 1 MPa nitrogen were 194 Wm−1 K−1, 0.15 (μm and 353 MPa, respectively.
Similar content being viewed by others
References
G. A. Slack, R. A. Tanzili, R. O. Pohl and J. W. Vandersande, J. Phys. Chem. Solids 48 (1987) 641.
W. Werdecker and F. Aidinger, IEEE Trans. Components Manuf. Technol. 4 (1984) 399.
C. A. Slake, J. Phys. Chem. Solids 34 (1973) 321.
Y. Kurokawa, K. Utsumi and H. Takamizawa, J. Am. Ceram. Soc. 71 (1988) 588.
“Studies on Aluminum Nitride”, Report. no 4 (National Institute for Researches in Inorganic Materials, Japan, 1973) p. 38.
K. Ishizaki and K. Watari, J. Phys. Chem. Solids 50 (1989) 1009.
K. Komeya, H. Inoue and A. Tsuge, Yogyo-kyokaishi 89 (1981) 330.
T. B. Troczynski and P. S. Nicholson, J. Am. Ceram. Soc. 72 (1989) 1488.
T. Yagi, K. Shinozaki, N. Mizutani, M. Kato and A. Tsuge, J. Mater. Sci. 24 (1989) 1332.
K. Komeya, A. Tsuge, H. Inoue and H. Ohta, J. Mater. Sci. Lett. 1 (1982) 325.
A. Kranzmann, P. Greil and G. Petzow, Sci. Sintering 20 (1988) 135.
N. Kuramoto, H. Taniguchi and I. Aso, Adv. Ceram. 26 (1989) 107.
J. H. Enloe, P. W. Rice, J. W. Lau, R. Kuman and S. Y. Lee, J. Am. Ceram. Soc. 74 (1991) 2214.
R. R. Lee, ibid. 74 (1991) 2242.
N. Kuramoto, H. Taniguchi and I. Aso, Am. Ceram. Soc. Bull. 68 (1989) 883.
M. Hirano, K. Kato, T. Isobe and T. Hirano, J. Mater. Sci., submitted.
N. Kuramoto, H. Taniguchi and I. Aso, IEEE Trans. Comp. Hybrids, Manuf. Technol. CHMT-9 (1986) 386.
Y. Kurokawa, H. Hamaguchi, Y. Shimada, K. Utsumi, H. Takamizawa, T. Kamata and S. Noguchi, Proc. IEEE 74 (1986) 412.
A. V. Virkar, T. B. Jackson and R. A. Cutler, J. Am. Ceram. Soc. 72 (1989) 2031.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Hirano, M., Yamauchi, N. Development of as-fired aluminium nitride substrates with smooth surface and high thermal conductivity. JOURNAL OF MATERIAL SCIENCE 28, 5737–5743 (1993). https://doi.org/10.1007/BF00365175
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/BF00365175