Abstract
Sol-gel processed PbTiO3 thin films have been deposited by spin coating onto different subtrates; Si[111], Si/Al, Si/SiO2/Cr/Pt, MgO[100], SrTiO3[100] and sapphire. Interactions between the substrate and PbTiO3 films after heat treatment have been studied by X-ray diffraction and Rutherford Back Scattering. When deposited onto sapphire and Si[111], PbTiO3 films exhibit a preferred orientation with (101) perpendicular to the substrate. These films become oriented along (100) onto MgO and (001) onto SrTiO3[100] substrates. A strong channelling effect is observed by the RBS technique when the film is oriented along the c axis on SrTiO3[100] suggesting that these films are epitaxially grown. The diffusion of metal atoms during the thermal treatment gives rise to the formation of lead silicate on Si[111] substrates. As a result a pyrochlore phase is formed. Lead titanate films on Si/SiO2/Cr/Pt and Si/Al substrates are polycrystalline and do not exhibit any texture.
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Guzmán, G., Barboux, P., Livage, J. et al. Crystallization of textured PbTiO3 films deposited from gels. J Sol-Gel Sci Technol 2, 619–622 (1994). https://doi.org/10.1007/BF00486321
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DOI: https://doi.org/10.1007/BF00486321