Skip to main content
SpringerLink
Log in

Analysis of the effects of substrate temperature, concentration of tin chloride and nature of dopants on the structural and electrical properties of sprayed SnO2 films

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

The correlations between structural and electrical properties of sprayed SnO2 films have been investigated as a function of substrate temperature (380–560 °C), concentration of tin precursor (0.02–0.8 M SnCl4) and the nature of the doping agent (chlorine, fluorine, antimony). High-resolution transmission electron microscopy has shown that chlorine or fluorine incorporation promotes the same type of defects, which are <0 1 1> twins. These latter behave as neutral defects, the density of which limits the carrier mobility of degenerated fluorine- or chlorine-doped films to around 20 cm2 V−1 s−1. The situation is totally different with antimony. Below the solubility limit in the SnO2 lattice (3%–4% Sb/Sn), Sn4+ are substituted by Sb5+, creating two conduction electrons per site and acting as point-charged defects which lower carrier mobility. Above this limit, the Sb3+ and Sb5+ forms coexist and are associated with an extremely large concentration of structural defects, especially twins induced by the Sb3+ species. These ions enter two-dimensional arrangements on both sides of the twins, making them planar charged defects.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Y. K. Fang, F. Y. Chen, J. D. Hwang, B. C. Fang andJ. R. Chen,Appl. Phys. Lett. 62 (1993) 490.

    Google Scholar 

  2. T. Feng, A. K. Ghosh andC. Fishman,ibid. 35 (1979) 266.

    Google Scholar 

  3. A. Subrahmanyam, V. Vasu, P. Santanaraghavan, J. Kumar andP. Ramasamy,Mater. Sci. Eng. B14 (1992) 365.

    Google Scholar 

  4. H. Cachet, A Messad, M. Froment andJ. Bruneaux, in “Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XI: Photovoltaïcs, Photochemistry and Photoelectrochemistry”, edited by A. Hugot, C. G. Granqvist, C. M. Lampert,Proc. SPIE 1729 (1992) p. 114.

  5. F. Decker, M. Fracastoro-Decker, W. Badawy, K. Doblhofer andH. Gerischer,J. Electrochem. Soc. 130 (1983) 2173.

    Google Scholar 

  6. J. Bruneaux, H. Cachet, M. Froment andA. Messad,Electrochim. Acta 36 (1991) 1787.

    Google Scholar 

  7. S. I. Ho, D. P. Whelan, K. Rajeshwar, A. Weiss, M. Murley andR. Reid,J. Electrochem. Soc. 135 (1988) 1452.

    Google Scholar 

  8. N. R. Lynam, in “Proceedings of the symposium on Electrochromic Materials”, edited by M. K. Carpenter and D. A. Corrigan, The Electrochemical Society, Proceedings Vol.90–2 (1990) p. 201.

  9. R. Kötz, S. Stucki andB. Carcer,J. Appl. Electrochem. 21 (1991) 14.

    Google Scholar 

  10. Ch. Commninellis andC. Pulgarin,ibid. 23 (1993) 108.

    Google Scholar 

  11. Y. Shigesato andD. C. Paine,Appl. Phys. Lett. 62 (1993) 1268.

    Google Scholar 

  12. J. Bruneaux, H. Cachet, M. Froment, M. Levart andJ. Vedel,J. Microsc. Spectrosc. Electron. 14 (1989) 1.

    Google Scholar 

  13. B. Gottlieb, R. Koropecki, R. Arce, R. Crisalle andJ. Ferron,Thin Solid Films 199 (1991) 13.

    Google Scholar 

  14. K. H. Kim andC. G. Park,J. Electrochem. Soc. 138 (1991) 2408.

    Google Scholar 

  15. J. Ferron andR. Arce,Thin Solid Films 204 (1991) 405.

    Google Scholar 

  16. R. Asomoza, A. Maldonado, J. Rickards, E. P. Zironi, M. H. Farias, I. Cota-Araiza andG. Soto,ibid. 203 (1991) 195.

    Google Scholar 

  17. M. Miki-Yoshida andE. Andrade,ibid. 224 (1993) 87.

    Google Scholar 

  18. T. Karlsson, A. Roos andC. G. Ribbing,Solar Energy Mater. 11 (1985) 469.

    Google Scholar 

  19. C. Agashe, M. G. Takwale, B. R. Marathe andV. G. Bhide,ibid. 17 (1988) 99.

    Google Scholar 

  20. N. Srinivasa Murty andS. R. Jawalekar,Thin Solid Films 100 (1983) 219.

    Google Scholar 

  21. K. Adachi andM. Mizuhashi, in “Chemical Vapor Deposition”, edited by G. W. Cullen and J. M. Blocher Jr., PV 87-8 (Electrochemical Society Softbound, Proceedings Series, Pennington, NJ, 1987) p. 999.

    Google Scholar 

  22. C. A. Vincent,J. Electrochem. Soc. 119 (1972) 515.

    Google Scholar 

  23. A. F. Caroll andL. H. Slack,ibid. 123 (1976) 1889.

    Google Scholar 

  24. E. Shanthi, V. Dutta, A. Banerjee andK. L. Chopra,J. Appl. Phys. 51 (1980) 6243.

    Google Scholar 

  25. J. Bruneaux, H. Cachet, M. Froment andA. Messad,Thin Solid Films 197 (1991) 129.

    Google Scholar 

  26. R. C. Weast (ed.), “Handbook of Physical Chemistry”, 63rd Ed. (CRC Press, Boca Roton, USA, 1982).

    Google Scholar 

  27. D. R. Pyke, R. Reid andR. J. D. Tilley,J.C.S. Farad. I 76 (1980) 1174.

    Google Scholar 

  28. J. Galy, G. Meunier, S. Anderson andA. Aastrom,J. Solid State Chem. 13 (1975) 142.

    Google Scholar 

  29. D. Pyke, R. Reid andR. J. D. Tilley,ibid. 25 (1975) 142.

    Google Scholar 

  30. G. W. Godin, C. C. McCain andE. A. Porter, in “Proceedings of the IV International Congress on Catalysis”, Moscow (1968) Vol. 1 (Akadimiai Kindó, Budapest, 1971) p. 271.

    Google Scholar 

  31. K. Wakabayashi, Y. Kamiya andH. Ohta,Bull. Chem. Soc. Jpn 40 (1967) 2172.

    Google Scholar 

  32. E. Gerlach andP. Grosse,Festkörperprobleme 17 (1977) 157.

    Google Scholar 

  33. Z. M. Jarzebski andJ. P. Marton,J. Electrochem. Soc. 123 (1976) 199C.

    Google Scholar 

  34. G. Sanon, R. Rup andA. Mansingh,Phys. Status Solidi A135 (1993) 581.

    Google Scholar 

  35. J. Lindhard,Kgl. Danske Videnskab. Selskab., Mat.-Fgs. Medd. No.8 (1954) 28.

    Google Scholar 

  36. D. Pines, “Elementary excitations in solids” (Benjamin, New York, 1964) p. 126–44.

    Google Scholar 

  37. B. Duke, “Solid State Physics”, Suppl. 10 (Academic Press, New York, 1969) p. 60.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. UPR15 du CNRS “Physique des Liquides et Electrochimie”, Université Pierre et Marie Curie, Tour 22, 4 Place Jussieu, 75252, Paris Cedex 05, France

    A. Messad, J. Bruneaux, H. Cachet & M. Froment

Authors
  1. A. Messad
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Bruneaux
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. H. Cachet
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Froment
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Messad, A., Bruneaux, J., Cachet, H. et al. Analysis of the effects of substrate temperature, concentration of tin chloride and nature of dopants on the structural and electrical properties of sprayed SnO2 films. J Mater Sci 29, 5095–5103 (1994). https://doi.org/10.1007/BF01151102

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01151102

Keywords

Search

Navigation