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Preparation of titanium nitride coated powders by rotary powder bed chemical vapour deposition

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Abstract

Titanium nitride coated powders were prepared by rotary powder bed chemical vapour deposition (CVD) in which a powder in a rotary specimen cell was heated by infrared radiation in a reactant gas stream. Titanium powder covered with TiN or Ti2N thin film was obtained by diffusion coating treatment of titanium particles (grain size 10 to 50 µm) at 900 to 1000°C and 0.5 to 1.0 atm for 60 min in a nitrogen stream. TiN was coated on to the surface of scaly graphite particles (grain size 30 to 100 µm or 100 to 1000 µm) as well as titanium particles by CVD in the reactant system TiCl4-N2-H2 at 900° C and 1 atm for 40 min. The uniformity of the coating (composition and film thickness) and the dispersability of the coated particles were considerably promoted by rotating the powder bed at about 90 r.p.m. compared with nonrotary powder bed CVD.

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References

  1. D. Hull, “An Introduction to Composite Materials” (Cambridge University Press, Cambridge, 1981) p. 1.

    Google Scholar 

  2. J. M. Blocher Jr,J. Vac. Sci. Technol. 11 (1974) 680.

    Google Scholar 

  3. C. F. Powell, J. H. Oxley andJ. M. Blocher Jr, “Vapor Deposition” (Wiley, New York, 1966) p. 12.

    Google Scholar 

  4. R. W. Kidd, M. F. Browning andJ. M. Rusin, in Proceedings of 7th International Conference on CVD (Electrochemical Society, Inc., Princeton, 1979) p. 563.

    Google Scholar 

  5. C. M. Hollabaugh, R. D. Reiswig, L. A. Wahman andR. W. White,J. Nucl. Mater. 57 (1975) 325.

    Google Scholar 

  6. P. Wagner, L. A. Wahman, R. W. White, C. M. Hollabauch andR. D. Reiswig,ibid. 62 (1976) 221.

    Google Scholar 

  7. C. E. Hamrin Jr andE. M. Foster, in Proceedings of Conference on CVD of Refractory Metals, Alloys and Compounds (American Nuclear Society, Inc., Hinsdale, 1967) p. 243.

    Google Scholar 

  8. G. Hsu, R. Hogle, N. Rohatgi andA. Morrison,J. Electrochem. Soc. 131 (1984) 660.

    Google Scholar 

  9. C. L. Yaws andG. F. Wakefield,Ceram. Bull. 51 (1972) 857.

    Google Scholar 

  10. K. Sugiyama, K. Kinbara andK. Sugiyama,Thin Solid Films 112 (1984) 357.

    Google Scholar 

  11. H. Itoh, K. Kato andK. Sugiyama,J. Mater. Sci. 21 (1986) 751.

    Google Scholar 

  12. G. V. Samsonov andA. P. Epik, “Coating of High-Temperature Materials”, Part 1 (Plenum, New York, 1966), p. 1.

    Google Scholar 

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Authors and Affiliations

  1. Synthetic Crystal Research Laboratory, Faculty of Engineering, Nagoya University, Furo-cho, Chikusa-ku, 464, Nagoya, Japan

    Hideaki Itoh, Norio Watanabe & Shigeharu Naka

Authors
  1. Hideaki Itoh
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  2. Norio Watanabe
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  3. Shigeharu Naka
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Itoh, H., Watanabe, N. & Naka, S. Preparation of titanium nitride coated powders by rotary powder bed chemical vapour deposition. J Mater Sci 23, 43–47 (1988). https://doi.org/10.1007/BF01174032

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  • DOI: https://doi.org/10.1007/BF01174032

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