Abstract
The etching of polycrystalline SiC is studied with the help of radiation of a copper-vapor laser either in air or under the layer of a liquid (H2O, DMSO). The etching rate in air is as high as 0.24 μm/pulse, in DMSO 0.07 gm/pulse at an energy density of 16 J/cm2. The etched surface is characterized with Scanning Electron Microscopy (SEM) and X-ray diffractometry. Etching of SiC ceramics in air revealed the partial amorphization of SiC and the formation of microcrystals of elementary Si with an average size of 300 Å. The etched surface of SiC ceramics takes on the ability to reduce Cu from a corresponding electroless plating solution. The adherence of the deposit is as high as 30 N/mm2 and is a function of the scanning velocity of the laser beam.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
H.W. Bergmann, K. Schutte, E. Shubert, A. Emmel: Appl. Surf. Sci.86, 259 (1995)
Y. Hibi, Y. Enomoto, K. Kikuchi, N. Shikata: Appl. Pbys. Lett.66, 817 (1995)
M. Geiger, W. Becker, T. Rebhan, J. Hutfless, N. Lutz: Tech. Dig. E-MRS Spring Meeting, Strasbourg (1995) Paper F-V.7
R. Fabbro, D. Devaux, P. Ballard: InProc. Int'l conf. on Laser Advanced Materials Processing, ed. by A. Matsunawa, S. Katayama (Nagaoka, Niigata, Japan) (1992) p. 269
G.A. Shafeev, A.V. Simakin: Appl. Phys. A54, 311 (1992)
A.V. Simakin, G.A. Shafeev: Appl. Surf. Sci.86, 422 (1995)
M.R. Brook, G.A. Shafeev: Appl. Surf. Sci.54, 336 (1992)
S.M. Pimenov, G.A. Shafeev, A.A. Smolin, V.A. Laptev, E.N. Loubnin: Appl. Phys. Lett.64, 1935 (1994)
R. Pini, R. Salimbeni, G. Toci, M. Vannini: InProc. Int'l Conf. LASER'93, (STS, Planegg 1994) p. 37
S.I. Dolgaev, A.A. Lyalin, A.V. Simakin, G.A. Shafeev: Quantum Electron. (in Russian) Quantum Electronics,23, No 1, 67 (1996) (in Russian)
G. Gutzeit, E.B. Saubestre, D.R. Turner: InElectroplating Engineering Handbook, 3rd edn., ed. by A.K. Graham (Van Nostrand Reinhold, New York 1971)
G.A. Shafeev, L. Bellard, J.-M. Themlin, C. Fauquet-Ben Ammar, A. Cros, W. Marine: Uncongruent laser ablation and metallization of SiC. Appl. Phys. Lett.68 (6), 773 (1996)
V.I. Iveronova, G.P. Ryvkevich: Theory of X-Ray Scattering (Moscow State Univ. Publ. Moscow 1978) (in Russian)
I. S. Grigoriev, E. Z. Meilikhov (eds.):Handbook of Physics (Energoatomizdat, Moscow 1991) (in Russian)
C. Buerbop, N. Lutz, R. Weißmann, G. Tomandl: Glastech. Ber.66, 61 (1993)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Dolgaev, S.I., Lyalin, A.A., Shafeev, G.A. et al. Fast etching and metallization of SiC ceramics with copper-vapor-laser radiation. Appl. Phys. A 63, 75–79 (1996). https://doi.org/10.1007/BF01579748
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF01579748