Abstract
Development of micro-MIM/-CIM was started at Forschungszentram Karlsrahe with the aim of creating a process suitable for a wide range of materials as well as for medium-scale and large-scale production of micro components. Using enhanced machine technology and special tempering procedures, this process enables the manufacturing of metal and ceramic devices with smallest wall thicknesses of 50 Μm and structural details of less than 3 Μm. Using ultrafine ceramic powders (e.g. zirconia) and high-quality LIGA mould inserts, surface qualities ofR a = 40 nm or Rmax ≤ 3 mm could be obtained. Possible practical applications are demonstrated by components of micro-annular gear pumps made of zirconia for future handling of very small volumes of dangerous fluids and micro samples (tensile and bending specimens) suitable for mechanical testing of metals (316L, 17-4PH) and ceramic materials (A12O3, ZrO2) in the micrometre range.
Similar content being viewed by others
References
German R M 1998 A rationalization of the powder injection moulding process for stainless steels based on component features.Proc 1998Int. Conf. on Powder Metallurgy & Paniculate Materials, Las Vegas, NV
Gietzelt T, Piotter V, Ruprecht R, Hausselt J 2001 Wear resistant micro parts made by micro powder injection moulding.Proc. HARMST 2001,Baden-Baden, Germany
Knitter R, Bauer W 2003 Ceramic microfabrication by rapid prototyping process chains; Frontiers in material science.Sadhana (this issue)
Merz L 1997Development of a polymer binder for powder injection moulding and binder extraction with supercritical carbon dioxide. Ph D thesis, University of Karlsruhe, Germany
Merz L, Rath S, Piotter V, Ruprecht R, Ritzhaupt-Kleissl J, Hausselt J 2001 Feedstock development for micro powder injection moulding;Proc. HARMST 2001 Baden-Baden; Germany
Piotter V, Benzler T, Ruprecht R, Hausselt J 1998 Manufacturing of microsized structures by MIM and CIM.Proc. 1998 Int. Conf. on Powder Metallurgy & Paniculate Materials, Las Vegas, NV, pp. 5–161-5-169
Piotter V, Benzler T, Hanemann T, Woellmer H, Ruprecht R, Hausselt J 1999 Innovative moulding technologies for the fabrication of components for microsystems.Proc. SPIE Conf. on Design, Test and Microfabrication of MEMS and MO EMS (Paris: SPIE) 3580: 456–463
Rota A, Duong V, Hartwig T 1998 Micro powder metallurgy for micropart production.Micro system technologies 98 (Berlin: VDE-Verlag GmbH) pp. 539–544
Ruprecht R, Piotter V 1999 Abformen von Mikroteilen aus Kunststoffen, Metallen und Keramiken.Jahrbuch OberflÄchentechnik (Hüthig Verlag) pp. 95–108
Shimizu T, Murakoshi Y, Wang Z, Maeda R, Sano T 1999 Microfabrication technique for thick structure of metals and PZT.Proc. SPIE Conf. on Design, Test, and Microfabrication of MEMS/MOEMS (Paris: SPIE) pp.472–477
Wechsung R 2000 Wachstumsmarkt Mikrosystemtechnik am Beispiel des LIGA-Mikrospektrometers (The growing market of microsystems technology explained by the LIGA micro spectrometer) FZKA-Report 6423, Karlsruhe Research Center, Karlsruhe
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Piotter, V., Gietzelt, T. & Merz, L. Micro powder-injection moulding of metals and ceramics. Sadhana 28, 299–306 (2003). https://doi.org/10.1007/BF02717139
Issue Date:
DOI: https://doi.org/10.1007/BF02717139