Skip to main content

Advertisement

SpringerLink
Log in

Exploring microdischarges for portable sensing applications

  • Review
  • Published:
Analytical and Bioanalytical Chemistry Aims and scope Submit manuscript

Abstract

This paper describes the use of microdischarges as transducing elements in sensors and detectors. Chemical and physical sensing of gases, chemical sensing of liquids, and radiation detection are described. These applications are explored from the perspective of their use in portable microsystems, with emphasis on compactness, power consumption, the ability to operate at or near atmospheric pressure (to reduce pumping challenges), and the ability to operate in an air ambient (to reduce the need for reservoirs of carrier gases). Manufacturing methods and performance results are described for selected examples.

Side-view photograph of an ultraviolet light source that uses microdischarges

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11

Similar content being viewed by others

References

  1. Foest R, Schmidt M, Becker K (2006) Int J Mass Spectrom 248:87–102

    Article  CAS  Google Scholar 

  2. Karanassios V (2004) Spectrochim Acta Part B 59:909–928

    Article  CAS  Google Scholar 

  3. Miclea M, Franzke J (2007) Plasma Chem Plasma Process 27:205–224

    Article  CAS  Google Scholar 

  4. Broekaert J (2002) Anal Bioanal Chem 374:182–187

    Article  CAS  PubMed  Google Scholar 

  5. Franzke J, Kunze K, Milcea M, Niemax K (2003) J Anal At Spectrom 18:802–807

    Article  CAS  Google Scholar 

  6. Broekaert J, Siemens V (2004) Anal Bioanal Chem 380:185–189

    Article  CAS  PubMed  Google Scholar 

  7. Franzke J, Miclea M (2006) Appl Spectrosc 60:80a–90a

    Article  CAS  PubMed  Google Scholar 

  8. Braman R, Dynako A (1968) Anal Chem 40:95–106

    Article  CAS  PubMed  Google Scholar 

  9. Lambertus G, Elstro A, Sensenig K, Potkay J, Agah M, Scheuering S, Wise K, Dorman F, Sacks R (2004) Anal Chem 76:2629–2637

    Article  CAS  PubMed  Google Scholar 

  10. Agah M, Lambertus G, Sacks R, Wise K (2006) J Microelectromech Syst 15:1371–1378

    Article  CAS  Google Scholar 

  11. Brede C, Lundanes E, Greibrokk T, Pedersen-Bjergaard S (1998) J High Resol Chromatogr 21:633–639

    Article  CAS  Google Scholar 

  12. Miclea M, Okruss M, Kunze K, Ahlman N, Franzke J (2007) Anal Bioanal Chem 388:1565–1572

    Article  CAS  PubMed  Google Scholar 

  13. Yin Y, Messier J, Hopwood J (1999) IEEE Trans Plasma Sci 27:1516–1524

    Article  Google Scholar 

  14. Hopwood J (2000) J Microelectromech Syst 9:309–313

    Article  CAS  Google Scholar 

  15. Minayeva O, Hopwood J (2002) J Anal At Spectrom 17:1103–1107

    Article  CAS  Google Scholar 

  16. Minayeva O, Hopwood J (2003) J Anal At Spectrom 18:856–863

    Article  CAS  Google Scholar 

  17. Engel U, Bilgic A, Haase O, Voges E, Broekaert J (2000) Plasma Sources Sci Technol 9:1–4

    Article  Google Scholar 

  18. Engel U, Bilgiç A, Haase O, Voges E, Broekaert J (2000) Anal Chem 72:193–197

    Article  CAS  PubMed  Google Scholar 

  19. Bilgiç A, Voges E, Engel U, Broekaert J (2000) J Anal At Spectrom 15:579–558

    Article  Google Scholar 

  20. Schermer S, Bings N, Bilgic A, Stonies R, Voges E, Broekaert J (2003) Spectrochim Acta Part B 58:1585–1596

    Article  CAS  Google Scholar 

  21. Broekaert J, Siemens V (2005) IEEE Trans Plasma Sci 32:560–561

    Article  CAS  Google Scholar 

  22. Stonies R, Schermer S, Voges E, Broekaert J (2004) Plasma Sources Sci Technol 13:604–611

    Article  CAS  Google Scholar 

  23. Iza F, Hopwood J (2003) IEEE Trans Plasma Sci 31:782–787

    Article  Google Scholar 

  24. Iza F, Hopwood J (2004) IEEE Trans Plasma Sci 32:498–504

    Article  Google Scholar 

  25. Hopwood J, Iza F (2004) J Anal At Spectrom 19:1145–1150

    Article  CAS  Google Scholar 

  26. Hopwood J, Iza F, Coy S, Fenner B (2005) J Phys D 38:1698–1703

    Article  CAS  Google Scholar 

  27. Liang D, Blades M (1988) Anal Chem 60:27–31

    Article  CAS  Google Scholar 

  28. Bass A, Chevalier C, Blades M (2001) J Anal At Spectrom 16:919–921

    Article  CAS  Google Scholar 

  29. Yoshiki H, Horike Y (2001) Jpn J Appl Phys 2 40:L350–L362

    Google Scholar 

  30. Taniguchi K, Fukusawa T, Yoshiki H, Horiike Y (2003) Jpn J Appl Phys 1 42:6584–6589

    Article  Google Scholar 

  31. Gross R, Platzer B, Leitner E, Schalk A, Sinabell H, Zach H, Knapi G (1992) Spectrochim Acta Part B 47:95–106

    Article  Google Scholar 

  32. Gibalov V, Pietsch G (2000) J Phys D 33:2618–2636

    Article  CAS  Google Scholar 

  33. Becker K, Kogelschatz U, Schoenbach K, Barker R (2004) Non-equilibrium air plasmas at atmospheric pressure. Institute of Physics, Bristol

    Google Scholar 

  34. Masoud N, Martus K, Becker K (2005) J Phys D 38:1674–1673

    Article  CAS  Google Scholar 

  35. Miclea M, Kunze K, Musa G, Franzke J, Niemax K (2001) Spectrochim Acta Part B 56:37–43

    Article  Google Scholar 

  36. Miclea M, Kunze K, Franzke J, Niemax K (2002) Spectrochim Acta Part B 57:1585–1592

    Article  Google Scholar 

  37. Kunze K, Miclea M, Musa G, Franzke J, Vadla C, Niemax K (2002) Spectrochim Acta Part B 57:137–146

    Article  Google Scholar 

  38. Kunze K, Miclea M, Franzke J, Niemax K (2003) Spectrochim Acta Part B 58:1435–1443

    Article  CAS  Google Scholar 

  39. Zhu Z, Zhang S, Lv Y, Zhang X (2006) Anal Chem 78:865–872

    Article  CAS  PubMed  Google Scholar 

  40. Zhu Z, Zhang S, Xue J, Zhang X (2006) Spectrochim Acta Part B 61:916–921

    Article  CAS  Google Scholar 

  41. Zhu Z, Liu J, Zhang S, Na X, Zhang X (2008) Anal Chim Acta 607:136–141

    Article  CAS  PubMed  Google Scholar 

  42. Zhu Z, Liu J, Zhang S, Na X, Zhang X (2008) Spectrochim Acta Part B 63:431–436

    Article  CAS  Google Scholar 

  43. Guchardi R, Hauser P (2003) J Anal At Spectrom 18:1056–1059

    Article  CAS  Google Scholar 

  44. Guchardi R, Hauser P (2004) J Chromatogr A 1033:333–338

    Article  CAS  PubMed  Google Scholar 

  45. Guchardi R, Hauser P (2004) Analyst 129:347–351

    Article  CAS  Google Scholar 

  46. Guchardi R, Hauser P (2004) J Anal At Spectrom 19:945–949

    Article  CAS  Google Scholar 

  47. Michels A, Tombrink S, Vautz W, Miclea M, Franzke J (2007) Spectrochim Acta Part B 62:1208–1215

    Article  CAS  Google Scholar 

  48. Stark R, Schoenbach K (1999) J Appl Phys 85:2075–2080

    Article  CAS  Google Scholar 

  49. Frame J, Wheeler D, De Temple T, Eden J (1997) Appl Phys Lett 71:1165–1167

    Article  CAS  Google Scholar 

  50. Schoenbach K, El-Habachi A, Moselhy M, Shi W, Stark R (2000) Phys Plasmas 7:2186–2191

    Article  CAS  Google Scholar 

  51. Moselhy M, Petzenhauser I, Frank K, Schoenbach K (2003) J Phys D 36:2922–2927

    Article  CAS  Google Scholar 

  52. Miclea M, Kunze K, Heitmann U, Florek S, Franzke J, Niemax K (2005) J Phys D 38:1709–1715

    Article  CAS  Google Scholar 

  53. Miclea M, Kunze K, Franzke J, Niemax K (2004) J Anal At Spectrom 19:990–994

    Article  CAS  Google Scholar 

  54. Park S, Chen J, Wagner C, Ostrom N, Liu C, Eden J (2002) IEEE J Sel Top Quantum Electron 8:139–147

    Article  CAS  Google Scholar 

  55. Eden J, Park S, Ostrom N, McCain S, Wagner C, Vojak B, Chen J, Liu C, von Allmen P, Zenhausern F, Sadler D, Jensen C, Wilcox D, Ewing J (2003) J Phys D 36:2869–2977

    Article  CAS  Google Scholar 

  56. Longwitz R, Van Lintel H, Renaud P (2003) J Vac Sci Technol B 21:1570–1573

    Article  CAS  Google Scholar 

  57. Wilson C, Gianchandani Y, Wendt A (2003) J Microelectromech Syst 12:835–839

    Article  Google Scholar 

  58. Eijkel J, Stoeri H, Manz A (1999) Anal Chem 71:2600–2606

    Article  CAS  Google Scholar 

  59. Eijkel J, Stoeri H, Manz A (2000) J Anal At Spectrom 15:297–300

    Article  CAS  Google Scholar 

  60. Eijkel J, Stoeri H, Manz A (2000) Anal Chem 72:2547–2552

    Article  CAS  PubMed  Google Scholar 

  61. Bessoth F, Naji O, Eijkel J, Manz A (2002) J Anal At Spectrom 17:794–799

    Article  CAS  Google Scholar 

  62. Naji O, Manz A (2004) Lab Chip 4:431–437

    Article  CAS  PubMed  Google Scholar 

  63. Mitra B, Gianchandani Y (2008) IEEE Sens J 8:1445–1454

    Article  CAS  Google Scholar 

  64. Morris J, Krey R, Garrison R (1969) Phys Rev 180:167–183

    Article  CAS  Google Scholar 

  65. Mitra B, Levey B, Gianchandani Y (2008) IEEE Trans Plasma Sci 36:1913–1924

    Article  CAS  Google Scholar 

  66. Kushner M (2005) J Phys D 38:1633–1643

    Article  CAS  Google Scholar 

  67. Abeysinghe D, Dasgupta S, Jackson H, Boyd J (2002) J Micromech Microeng 12:229–235

    Article  CAS  Google Scholar 

  68. Fielder R, Stingson-Bagby K, Palmer M (2004) In: Proceedings of SPIE, fiber optic sensor technology and applications III, Philadelphia, pp 60–69

  69. Li T, Wang Z, Wang Q, Wei X, Xu B, Hao W, Meng F, Dong S (2007) In: Proceedings of SPIE, sensors for harsh environments III, Boston, pp 1–7

  70. Ned A, Okojie R, Kurtz A (1998) In: Proceedings of the international high temperature electronics conference, Albuquerque, pp 257–260

  71. Fricke S, Friedberg A, Ziemann T, Rose E, Muller G, Telitschkin D, Ziegenhagen S, Seidel H, Schmidt U (2006) In: Proceedings of micro-nano-technology aerospace applications, Toulouse

  72. Guo S, Eriksen H, Childress K, Fink A, Hoffman M (2008) Proceedings of the IEEE international conference on micro electro mechanical systems, Tucson, pp 892–895

  73. Wright S, Gianchandani Y (2009) J Microelectromech Syst 18:736–743

    Article  CAS  Google Scholar 

  74. Edelmann C (1990) Vacuum 41:2006–2008

    Article  CAS  Google Scholar 

  75. Allen D (2003) Proc Inst Mech Eng B 217:643–650

    Article  CAS  Google Scholar 

  76. Wright S, Gianchandani Y (2007) J Vac Sci Technol B 25:1711–1720

    Article  CAS  Google Scholar 

  77. Yoon J, Lee D, Nam H, Cha G, Strong T, Brown R (1999) J Electroanal Chem 464:135–142

    Article  CAS  Google Scholar 

  78. Taylor S, Srigengan B, Gibson J, Tindall D, Syms R, Tate T, Ahmad M (2000) In: Proceedings of SPIE, chemical and biological sensing, Orlando, pp 187–193

  79. Miller R, Nazarov E, Eiceman G, King A (2001) Sens Actuators A. 91:301–312

    Article  CAS  Google Scholar 

  80. Jenkins G, Manz A (2002) J Micromechanics Microengineering 12:N19–N22

    Article  CAS  Google Scholar 

  81. Cserfalvi T, Mezei P (2003) J Anal At Spectrom 18:596–602

    Article  CAS  Google Scholar 

  82. Kim H, Lee J, Kim M, Cserfalvi T, Mezei P (2000) Spectrochim Acta Part B 55:823–831

    Article  Google Scholar 

  83. Johnson K, Wilp W, Karanassios V (2001) In: Proceedings of SPIE, Boston, pp 347–352

  84. Karanassios V, Johnson K, Smith A (2007) Anal Bioanal Chem 388:1595–1604

    Article  CAS  PubMed  Google Scholar 

  85. Davis W, Marcus R (2001) J Anal At Spectrom 16:931–937

    Article  CAS  Google Scholar 

  86. Marcus R, Davis W (2001) Anal Chem 73:2903–2910

    Article  CAS  PubMed  Google Scholar 

  87. Wilson C, Gianchandani Y (2002) IEEE Trans Electron Devices 49:2317–2322

    Article  CAS  Google Scholar 

  88. Que L, Wilson C, Gianchandani Y (2005) J Microelectromech Syst 14:185–191

    Article  CAS  Google Scholar 

  89. Zorn M, Wilson C, Gianchandani Y, Anderson M (2004) IEEE Sens Lett 2:179–185

    Article  CAS  Google Scholar 

  90. Mitra B, Wilson C, Que L, Selvaganapathy P, Gianchandani Y (2006) Lab Chip 6:60–65

    Article  CAS  PubMed  Google Scholar 

  91. Haugland R (1996) Handbook of fluorescence probes and research chemicals. Molecular Probes, Eugene

    Google Scholar 

  92. Knoll G (2000) Radiation detection and measurement. Wiley, New York

    Google Scholar 

  93. Hirschfelder J, Magee J, Hull M (1948) Phys Rev 73:852–862

    Article  CAS  Google Scholar 

  94. Shimoni U, Sheinfux B, Seidman A, Grinberg J, Avrahami Z (1974) Nucl Instrum Methods 117:599–603

    Article  CAS  Google Scholar 

  95. Shafrir B, Seidman A (1975) Nucl Instrum Methods 129:177–186

    Article  Google Scholar 

  96. Nakamura M (1983) J Appl Phys 54:3141–3149

    Article  CAS  Google Scholar 

  97. Kiff S, He Z, Tepper G (2005) IEEE Trans Nucl Sci 52:2932–2939

    Article  Google Scholar 

  98. van Vuure T, van Eijk C, Fraga F, Hollander R, Margato L (2001) IEEE Trans Nucl Sci 48:1092–1094

    Article  Google Scholar 

  99. Veloso J, Amaro F, dos Santos J, Mir J, Derbyshire G, Stephenson R, Rhodes N, Schooneveld E (2004) IEEE Trans Nucl Sci 51:2104–2109

    Article  CAS  Google Scholar 

  100. Charpak G, Bouclier R, Bressani T, Favier J, Zupancic C (1968) Nucl Instrum Methods 62:262–268

    Article  Google Scholar 

  101. Oed A (1988) Nucl Instrum Methods Phys Res A 263:351–359

    Article  Google Scholar 

  102. Francke T, Vladimir P (2003) In: Proceedings INFN ELOISATRON project workshop, Erice, pp 158–179

  103. Charpak G, Derre J, Giomataris Y, Rebourgeard P (2002) Nucl Instrum Methods Phys Res A 478:26–36

    Article  CAS  Google Scholar 

  104. Sarvestani A, Besch H, Junk M, MeiBner W, Pavel N, Sauer N, Stiehler R, Walenta A, Menk R (1998) Nucl Instrum Methods Phys Res A 419:444–451

    Article  CAS  Google Scholar 

  105. Sauli F (2001) Nucl Instrum Meth Phys Res A 461:47–54

    Article  CAS  Google Scholar 

  106. Breskin A (2000) Nucl Instrum Methods Phys Res A 454:26–39

    Article  CAS  Google Scholar 

  107. Kyker R, Berry N, Stark D, Nachtigal N, Kershaw C (2004) Proceedings of SPIE, digital wireless communications VI, Orlando, pp 293–304

  108. Nemzek R, Dreicer J, Torney D, Warnock T (2004) IEEE Trans Nucl Sci 51:1693–1700

    Article  CAS  Google Scholar 

  109. Brittain J (2004) Proc IEEE 92:1501–1504

    Article  Google Scholar 

  110. Heaton A, Reeves J (1974) In: International conference on gas discharges, London, pp 73–77

  111. Eun C, Gianchandani Y (2008) J Micromechanics Microengineering 18:095007

    Article  CAS  Google Scholar 

  112. Eun C, Gharpurey R, Gianchandani Y (2006) In: Proceedings of the IEEE international conference micro electro mechanical systems, Istanbul, pp 570–573

  113. Eun C, Gharpurey R, Gianchandani Y (2006) In: Proceedings of solid-state sensors, actuators, microsystems workshop, Hilton Head, pp 236–239

  114. Petersen K (1982) Proc IEEE 70:420–457

    Article  CAS  Google Scholar 

  115. Belloy E, Sayah A, Gijs M (2000) Sens Actuators A 86:231–237

    Article  CAS  Google Scholar 

  116. West J, Jadhav A (2007) J Micromechanics Microengineering 17:403–409

    Article  Google Scholar 

  117. Zheng Z, Cheng W, Huang F, Yan B (2007) J Micromechanics Microengineering 17:960–966

    Article  CAS  Google Scholar 

  118. Eun C, Gianchandani Y (2008) In: Proceedings of solid-state sensors, actuators, microsystems workshop, Hilton Head, pp 308–311

  119. Richardson M, Gianchandani Y (2008) J Micromechanics Microengineering 18:015002

    Article  CAS  Google Scholar 

Download references

Acknowledgements

The authors are grateful to Long Que, Ranjit Gharpurey, Mike Zorn, Marc Anderson, Amy Wendt, Victor Kolobov, Robert Arslanbekov, Ravi Selvaganapathy, and others who have collaborated on various parts of the effort over the years. Portions of the work described here have been supported by the National Science Foundation, the Sea Grant Institute, and the Water Resources Institute. Y.B.G. acknowledges support through the IR/D program while working at the National Science Foundation. The findings do not necessarily reflect the views of the National Science Foundation.

Author information

Authors and Affiliations

  1. Center for Wireless Integrated Microsystems, University of Michigan, EECS Building, 1301 Beal Ave, Ann Arbor, MI, 48109-2122, USA

    Y. B. Gianchandani, S. A. Wright & C. K. Eun

  2. Institute for Micromanufacturing, Louisiana Tech University, 911 Hergot Avenue, Ruston, LA, 71272, USA

    C. G. Wilson

  3. Department of Electrical Engineering and Computer Engineering, Rutgers University, 94 Brett Road, Piscataway, NJ, 08854-8058, USA

    B. Mitra

Authors
  1. Y. B. Gianchandani
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. A. Wright
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. C. K. Eun
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. C. G. Wilson
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. B. Mitra
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Y. B. Gianchandani.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Gianchandani, Y.B., Wright, S.A., Eun, C.K. et al. Exploring microdischarges for portable sensing applications. Anal Bioanal Chem 395, 559–575 (2009). https://doi.org/10.1007/s00216-009-3011-6

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00216-009-3011-6

Keywords

Search

Navigation