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Characterization of the bonding structure of nanocrystalline diamond and amorphous carbon films prepared by plasma assisted techniques

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Abstract

Thin nanocrystalline diamond/amorphous carbon (NCD/a-C) composite films and amorphous diamond-like carbon (DLC) films were prepared by three methods: microwave plasma chemical vapour deposition (MWCVD) from methane/nitrogen mixtures (NCD/a-C), RF magnetron sputtering of a pure graphite target in argon/methane ambients, and pulsed laser deposition (PLD) in vacuum or argon atmosphere (DLC). The films prepared by the three techniques were comprehensively characterized with respect to their bonding structure by Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS).

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Authors and Affiliations

  1. Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett-Str. 40, 34109, Kassel, Germany

    C. Popov, W. Kulisch & S. Bliznakov

  2. JRC, Institute for Health and Consumer Protection, 21020, Ispra, Italy

    W. Kulisch

  3. Central Laboratory of Photoprocesses, Bulgarian Academy of Sciences, Acad. G. Bonchev St. Bl. 109, 1113, Sofia, Bulgaria

    B. Mednikarov, G. Spasov & J. Pirov

  4. Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 18221, Prague 8, Czech Republic

    M. Jelinek, T. Kocourek & J. Zemek

Authors
  1. C. Popov
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  2. W. Kulisch
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  3. S. Bliznakov
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  4. B. Mednikarov
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  5. G. Spasov
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  6. J. Pirov
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  7. M. Jelinek
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  8. T. Kocourek
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  9. J. Zemek
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Corresponding author

Correspondence to C. Popov.

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PACS

81.05.Uw; 82.80.Pv

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Popov, C., Kulisch, W., Bliznakov, S. et al. Characterization of the bonding structure of nanocrystalline diamond and amorphous carbon films prepared by plasma assisted techniques. Appl. Phys. A 89, 209–212 (2007). https://doi.org/10.1007/s00339-007-4092-8

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  • DOI: https://doi.org/10.1007/s00339-007-4092-8

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