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Selective metallization of photostructurable glass by femtosecond laser direct writing for biochip application

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Abstract

We report the selective metallization of photostructurable glass by femtosecond (fs) laser direct writing followed by electroless copper (Cu) plating. It was found that a Cu thin film can be deposited only on the rough surface of glass ablated by the fs laser. The deposited Cu thin film exhibits strong adhesion and excellent electrical properties. A Cu film can even be deposited on the internal wall of a hollow microchannel inside photostructurable glass by the multiphoton absorption of the fs laser. To show the use of this technique for micro-total-analysis-system (μ-TAS) applications, the fabrication of a microheater operating at temperatures up to 200 °C was demonstrated.

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Authors and Affiliations

  1. RIKEN – The Institute of Physical and Chemical Research , 2-1 Hirosawa, Wako, Saitama, 351-0198, Japan

    Y. Hanada, K. Sugioka & K. Midorikawa

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  1. Y. Hanada
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  2. K. Sugioka
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  3. K. Midorikawa
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Corresponding author

Correspondence to Y. Hanada.

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PACS

81.05.Kf; 85.40.Ls; 87.85.Va

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Hanada, Y., Sugioka, K. & Midorikawa, K. Selective metallization of photostructurable glass by femtosecond laser direct writing for biochip application. Appl. Phys. A 90, 603–607 (2008). https://doi.org/10.1007/s00339-007-4373-2

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  • DOI: https://doi.org/10.1007/s00339-007-4373-2

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