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Micromachining of quartz with ultrashort laser pulses

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Authors and Affiliations

  1. Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Postfach 1107, D-12474 Berlin, Germany (Fax: +49 30 6392 1229, E-mail: campbell@mbi-berlin.de), , , , , , DE

    H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wähmer & E.E.B. Campbell

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  1. H. Varel
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  2. D. Ashkenasi
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  3. A. Rosenfeld
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  4. M. Wähmer
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  5. E.E.B. Campbell
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Received: 6 January 1997/Accepted: 1 April 1997

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Varel, H., Ashkenasi, D., Rosenfeld, A. et al. Micromachining of quartz with ultrashort laser pulses . Appl Phys A 65, 367–373 (1997). https://doi.org/10.1007/s003390050593

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  • DOI: https://doi.org/10.1007/s003390050593

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