Effect of dimensional and material property uncertainties on thermal flexure microactuator response using probabilistic methods

Micromachining of microelectromechanical systems such as other fabrication processes has inherent variation that leads to uncertain dimensional and material properties. In this paper, the effect of material and feature dimension uncertainties due to fabrication process on electrothermal microactuator tip deflection is investigated. A simple and efficient uncertainty analysis method is used based on direct linearization method (DLM); uncertainty analysis is performed by creating second-order metamodel through Box-Behnken design and Monte Carlo simulation. The standard deviations of tip deflection obtained by these two probabilistic methods are very close. Simulation results have been validated by a comparison with experimental results in literature. Experimental results fall within 95% confidence boundary obtained by DLM method. Also, sensitivity analysis of microactuator has been explored; the results show that microactuator performance has been affected more by thermal expansion coefficient and microactuator gap uncertainties.